Chalcogenide-containing precursors, methods of making, and methods of using the same for thin film deposition
First Claim
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1. A method for the deposition of a chalcogenide-containing film, comprising the steps of:
- a) introducing into a reactor containing at least one substrate a vapor of at least one chalcogenide-containing precursor selected from the group consisting of Me2Ge(TetBu)2, tBu2Ge(TetBu)2, Me2Ge(TeSiMe3)2, (Me3Si)2Ge(TeSiMe3)2, Me2Si(TeMe)2, Me2Si(TetBu)2, tBu2Si(TetBu)2, Me2Si(TeSiMe3)2, (Me3Si)2Si(TeSiMe3)2, MeGe(TeMe)3, MeGe(TetBu)3, (SiMe3)Ge(TeSiMe3)3, MeSi(TeMe)3, MeSi(TetBu)3, and (SiMe3)Si(TeSiMe3); and
b) depositing at least part of the at least one chalcogenide-containing precursor onto the at least one substrate to form a chalcogenide-containing film on at least one surface of the at least one substrate using a vapor deposition process.
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Abstract
Disclosed are chalcogenide-containing precursors for use in the manufacture of semiconductor, photovoltaic, LCD-TFT1 or flat panel type devices. Also disclosed are methods of synthesizing the chalcogenide-containing precursors and vapor deposition methods, preferably thermal ALD, using the chalcogenide-containing precursors to form chalcogenide-containing films.
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12 Claims
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1. A method for the deposition of a chalcogenide-containing film, comprising the steps of:
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a) introducing into a reactor containing at least one substrate a vapor of at least one chalcogenide-containing precursor selected from the group consisting of Me2Ge(TetBu)2, tBu2Ge(TetBu)2, Me2Ge(TeSiMe3)2, (Me3Si)2Ge(TeSiMe3)2, Me2Si(TeMe)2, Me2Si(TetBu)2, tBu2Si(TetBu)2, Me2Si(TeSiMe3)2, (Me3Si)2Si(TeSiMe3)2, MeGe(TeMe)3, MeGe(TetBu)3, (SiMe3)Ge(TeSiMe3)3, MeSi(TeMe)3, MeSi(TetBu)3, and (SiMe3)Si(TeSiMe3); and b) depositing at least part of the at least one chalcogenide-containing precursor onto the at least one substrate to form a chalcogenide-containing film on at least one surface of the at least one substrate using a vapor deposition process. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification