Method of making heat treated coated article using TCO and removable protective film
First Claim
1. A method of making a heat treated coated article adapted to be used in window, the method comprising:
- heat treating a coated substrate comprising a substrate, a transparent conductive oxide (TCO) layer on the substrate, a gettering layer on the substrate over and in direct contact with the TCO layer, wherein the gettering layer comprises carbon and fluorine so as to getter oxygen during said heat treating and help dope the TCO layer with F to improve conductivity, and a protective film on the substrate over at least the TCO layer and the gettering layer, wherein the protective film includes a release layer and an oxygen barrier layer where the release layer and the oxygen barrier layer are of different material and/or different stoichiometry relative to each other,wherein the heat treating comprises heating at least the substrate to temperature(s) of at least 500 degrees C.;
during said heat treating of the coated substrate with the TCO layer and the gettering layer and the protective film thereon, the protective film protects the TCO layer so that the TCO layer does not lose a significant amount of electrical conductivity and does not lose a significant amount of visible transmission during said heat treating so that the coated article is to be used in a window, and the gettering layer getters oxygen and provides fluorine for doping the TCO layer to improve conductivity thereof; and
exposing the protective film to a release liquid and removing at least part of the protective film during and/or after said heat treating, before the window is formed.
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Accused Products
Abstract
A method for making a heat treated (HT) coated article including an electrode, to be used in applications such as windows, electronic devices, or other applications. The method may include heat treating a substrate coated with at least a transparent conductive oxide (TCO) layer and an overlying film. From the TCO outwardly, the overlying film may include any combination of two, three or four of: (i) a gettering and/or doping layer(s); (ii) a stabilizing layer(s); (iii) a release layer(s); and (iv) an oxygen blocking or barrier layer. After HT, the protective film may be entirely or partially removed. Other embodiments relate to the pre-HT coated article, or the post-HT coated article.
27 Citations
26 Claims
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1. A method of making a heat treated coated article adapted to be used in window, the method comprising:
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heat treating a coated substrate comprising a substrate, a transparent conductive oxide (TCO) layer on the substrate, a gettering layer on the substrate over and in direct contact with the TCO layer, wherein the gettering layer comprises carbon and fluorine so as to getter oxygen during said heat treating and help dope the TCO layer with F to improve conductivity, and a protective film on the substrate over at least the TCO layer and the gettering layer, wherein the protective film includes a release layer and an oxygen barrier layer where the release layer and the oxygen barrier layer are of different material and/or different stoichiometry relative to each other, wherein the heat treating comprises heating at least the substrate to temperature(s) of at least 500 degrees C.; during said heat treating of the coated substrate with the TCO layer and the gettering layer and the protective film thereon, the protective film protects the TCO layer so that the TCO layer does not lose a significant amount of electrical conductivity and does not lose a significant amount of visible transmission during said heat treating so that the coated article is to be used in a window, and the gettering layer getters oxygen and provides fluorine for doping the TCO layer to improve conductivity thereof; and exposing the protective film to a release liquid and removing at least part of the protective film during and/or after said heat treating, before the window is formed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 21, 22, 23, 26)
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20. A method of making a heat treated coated article adapted to be used in window, the method comprising:
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heat treating a coated glass substrate comprising a glass substrate, a transparent conductive layer comprising ITO on the glass substrate, a gettering layer on the glass substrate over and in direct contact with the layer comprising ITO, wherein the gettering layer comprises carbon and fluorine so as to getter oxygen during said heat treating and help dope the TCO layer with F to improve conductivity, and a protective film on the glass substrate over at least the layer comprising ITO and the gettering layer, wherein the protective film includes a release layer comprising zinc oxide and an oxygen barrier layer comprising metal nitride; during said heat treating of the coated glass substrate with the layer comprising ITO, the gettering layer and the protective film thereon, the protective film protects the layer comprising ITO so that the layer comprising ITO does not lose a significant amount of electrical conductivity and does not lose a significant amount of visible transmission during said heat treating so that the coated article is to be used in a window, and the gettering layer getters oxygen and provides fluorine for doping the layer comprising ITO to improve conductivity thereof; and removing at least part of the protective film during and/or after said heat treating, before the window is formed. - View Dependent Claims (24, 25)
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Specification