Localized heat treatment of battery component films

• US 9,257,695 B2
• Filed: 03/29/2012
• Issued: 02/09/2016
• Est. Priority Date: 03/29/2012
• Status: Active Grant

• Current Assignee: KLA Corporation
• Original Assignee: Front Edge Technology, Inc
• Inventors: Liang, Jiuh-Ming
• Primary Examiner(s): Slifka, Sarah A
• Application Number:
  US13/434,775
• Publication Number:
  US 20130260230A1
• Time in Patent Office: 1,412 Days
• Field of Search: None
• US Class Current: 1/1
• CPC Class Codes: H01M 10/0436 Small-sized flat cells or batteries for portable equipment
• CPC Class Codes: H01M 10/052 Li-accumulators
• CPC Class Codes: H01M 10/0562 Solid materials
• CPC Class Codes: H01M 10/0585 of accumulators having only flat construction elements, i.e. flat positive electrodes, flat negative electrodes and flat separators
• CPC Class Codes: H01M 4/0404 by coating on electrode collectors
• CPC Class Codes: H01M 4/0442 Anodisation, Oxidation electrolytic coating by anodisation C25D9/00
• CPC Class Codes: H01M 4/0471 involving thermal treatment, e.g. firing, sintering, backing particulate active material, thermal decomposition, pyrolysis
• CPC Class Codes: H01M 4/131 Electrodes based on mixed oxides or hydroxides, or on mixtures of oxides or hydroxides, e.g. LiCoOx
• CPC Class Codes: H01M 4/134 Electrodes based on metals, Si or alloys
• CPC Class Codes: H01M 4/1391 of electrodes based on mixed oxides or hydroxides, or on mixtures of oxides or hydroxides, e.g. LiCoOx
• CPC Class Codes: H01M 4/1395 of electrodes based on metals, Si or alloys
• CPC Class Codes: H01M 4/38 of elements or alloys
• CPC Class Codes: H01M 4/485 of mixed oxides or hydroxides for inserting or intercalating light metals, e.g. LiTi2O4 or LiTi2OxFy H01M4/505, H01M4/525 take precedence
• CPC Class Codes: H01M 4/505 of mixed oxides or hydroxides containing manganese for inserting or intercalating light metals, e.g. LiMn2O4 or LiMn2OxFy
• CPC Class Codes: H01M 4/525 of mixed oxides or hydroxides containing iron, cobalt or nickel for inserting or intercalating light metals, e.g. LiNiO2, LiCoO2 or LiCoOxFy
• CPC Class Codes: H01M 4/661 Metal or alloys, e.g. alloy coatings H01M4/669 take precedence
• CPC Class Codes: Y02E 60/10 Energy storage using batteries
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product
• CPC Class Codes: Y10T 29/49108 Electric battery cell making

Abstract

A battery fabrication method includes forming on a substrate, at least a portion of a battery cell having a plurality of battery component films that include an underlying film with an overlying metal-containing film. A beam incident area of the metal-containing film is locally heated by directing onto the metal-containing film, an energy beam maintained at a fluence of at least about 800 J/cm². The metal-containing film is heated to a temperature that is at least 100° C. higher than the temperature attained by the underlying film.

Claims

1. A battery fabrication method comprising:

(a) forming on a substrate, at least a portion of a battery cell comprising a plurality of battery component films that include an underlying film with an overlying metal-containing film;

(b) selecting an electromagnetic radiation beam that has a reflection coefficient from the underlying film of at least about 5%; and

(c) locally heating a beam incident area on the metal-containing film by directing onto the metal-containing film, the selected electromagnetic radiation beam maintained at a fluence of at least about 800 J/cm², wherein the metal-containing film is heated to a temperature that is at least 100°

C. higher than the temperature attained by the underlying film.

2. A method according to claim 1 wherein the underlying film comprises a first metal-containing film and the overlying metal-containing film comprises a second metal-containing film, and wherein (c) comprises maintaining the fluence of the energy beam at a level that is sufficiently high to heat the second metal-containing film to a temperature of at least 400°

C. while the maximum temperature simultaneously attained by the first metal-containing film during the local heating process is maintained at less than 300°

C.

3. A method according to claim 1 wherein (b) comprises selecting an electromagnetic radiation beam comprising at least one of:

a linear attenuation coefficient in the metal-containing film of at least about 5×

10<sup>−

4</sup>; and

(ii) a Half Value Layer in the metal-containing film of at least about 1 micron.

4. A method according to claim 1 wherein (b) comprises selecting an electromagnetic radiation beam having at least one of the following properties:

(i) a beam width of less than about 1000 microns;

(ii) that is a CO₂ laser beam; and

(iii) a wavelength of from about 1 to about 100 microns.

5. A method according to claim 1 wherein (c) comprises scanning the electromagnetic radiation beam across the metal-containing film.

6. A method according to claim 1 wherein the underlying film comprises an elemental metal electrode and the overlying metal-containing film comprises a metal oxide electrode.

7. A method according to claim 6 wherein the elemental metal electrode comprises at least one of molybdenum, platinum, tantalum or tungsten.

8. A method according to claim 6 wherein the metal oxide electrode comprises a lithium oxide material.

9. A method according to claim 6 wherein (c) comprises maintaining an oxygen-containing gas about the metal oxide electrode while directing the electromagnetic radiation beam onto the metal oxide electrode.

10. A battery fabrication method comprising:

(a) forming on a substrate, at least a portion of a battery cell comprising an elemental metal electrode and a metal oxide electrode;

(b) selecting an electromagnetic radiation beam having at least one of the following properties;

(i) a beam width of less than about 1000 microns;

(ii) that is a CO₂ laser beam; and

(iii) a wavelength of from about 1 to about 100 microns; and

(c) directing the electromagnetic radiation beam onto the metal oxide electrode, the electromagnetic radiation beam being maintained at a sufficiently low power level to heat a beam incident area on the metal oxide electrode to a temperature of at least 400°

C.

11. A method according to claim 10 wherein (b) comprises selecting the electromagnetic radiation beam to have a linear attenuation coefficient in the metal oxide electrode of at least about 5×

10<sup>−

4</sup>.

12. A method according to claim 10 wherein (b) comprises selecting the electromagnetic radiation beam to have a Half Value Layer in the metal oxide electrode of at least about 1 micron.

13. A method according to claim 10 wherein (b) comprises selecting the electromagnetic radiation beam such that the reflection coefficient of the electromagnetic radiation beam from the elemental metal electrode is at least about 5%.

14. A method according to claim 10 wherein (a) comprises forming an elemental metal electrode comprising at least one of chromium, molybdenum, tantalum or tungsten.

15. A method according to claim 10 wherein (a) comprises forming a metal oxide electrode comprising a lithium oxide material.

16. A method according to claim 10 wherein (c) comprises maintaining an oxygen-containing gas about the metal oxide electrode.

17. A heat treatment method comprising:

(a) forming on a substrate, at least a portion of a battery cell comprising a plurality of battery component films that include an elemental metal electrode and an overlying metal oxide electrode;

(b) selecting an electromagnetic radiation beam having at least one of the following characteristics;

(i) a linear attenuation coefficient in the metal oxide electrode of at least about 5×

10<sup>−

4</sup>;

(ii) a reflection coefficient from the elemental metal electrode that is at least about 5%; and

(iii) a Half Value Layer in the metal oxide electrode of at least about 1 micron; and

(c) directing the electromagnetic radiation beam onto the metal oxide electrode to heat treat the metal oxide electrode.

18. A method according to claim 17 wherein the electromagnetic radiation beam is sized to cover a beam incident area on the metal oxide electrode, and wherein (c) comprises maintaining the electromagnetic radiation beam at a sufficiently low power level to heat the beam incident area on the metal oxide electrode to a temperature of at least about 400°

C.

19. A method according to claim 17 wherein (c) further comprises maintaining an oxygen-containing gas about the metal oxide electrode of the battery cell.

20. A battery fabrication method comprising:

(a) forming on a substrate, at least a portion of a battery cell comprising a plurality of battery component films that include an underlying first metal-containing film and an overlying second metal-containing film;

(b) selecting an energy beam comprising at least one of;

(i) a linear attenuation coefficient in the second metal-containing film of at least about 5×

10<sup>−

4</sup>; and

(ii) a Half Value Layer in the second metal-containing film of at least about 1 micron; and

(c) directing onto the second metal-containing film, the selected energy beam maintained at a fluence of at least about 800 J/cm² to locally heat a beam incident area on the second metal-containing film to a temperature that is (i) at least 400°

C., and (ii) at least 100°

C. higher than the temperature attained by the first metal-containing film.

21. A method according to claim 20 wherein (b) comprises selecting an energy beam comprising an electromagnetic radiation beam having a reflection coefficient from the first metal-containing film of at least about 5%.

22. A method according to claim 21 wherein (b) comprises selecting an electromagnetic radiation beam having at least one of the following properties:

(i) a beam width of less than about 1000 microns;

(ii) that is a CO₂ laser beam; and

(iii) a wavelength of from about 1 to about 100 microns.

23. A method according to claim 20 wherein the first metal-containing film comprises an elemental metal electrode and the second metal-containing film comprises a metal oxide electrode.

24. A method according to claim 23 wherein (i) the elemental metal electrode comprises at least one of molybdenum, platinum, tantalum or tungsten, and (ii) the metal oxide electrode comprises a lithium oxide material.