Measurement microscope device, image generating method, measurement microscope device operation program, and computer-readable recording medium
First Claim
1. A measurement microscope device comprising:
- a first measurement light projecting unit configured to irradiate an object with first measurement light from a first direction, the unit being a measurement light projecting unit for projecting measurement light as predetermined pattern structured illumination to the object from an oblique direction;
an observation illumination light source for generating illumination light when capturing an observation image;
an imaging unit for acquiring measurement light projected by the first measurement light projecting unit and reflected by the object to capture a plurality of striped images, and using the observation illumination light source to capture an observation image having texture information;
a height image acquiring unit for acquiring a height image having height information based on the plurality of striped images;
a stage on which the object is placed;
a display unit for displaying the height image or the observation image;
a measurement unit for performing measurement on the height image displayed on the display unit;
an image connecting unit configured to, by moving the stage and capturing a different region including a connection margin by the imaging unit, acquire a plurality of height images for connection and observation images for connection, and connect the obtained plurality of height images for connection and observation images for connection to generate a connected image;
a measurement error region display unit configured to superimpose and display a measurement error region, where a result of measurement of the height is error, on an image of the object corresponding to each region to be connected by the image connecting unit; and
a measurement-image imaging condition setting unit for adjusting an imaging condition for a striped image required for generation of the height image to reduce the measurement error region in a state where the measurement error region is displayed.
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Accused Products
Abstract
An image with a wide visual field can be captured without causing deterioration in measurement accuracy. There are provided: a stage on which an object is placed; a display unit for displaying a height image or an observation image; a measurement unit for performing measurement on the height image; an image connecting unit configured to, by moving the stage and capturing a different region, acquire a plurality of height images, and connect the obtained plurality of height images and observation images to generate a connected image; a measurement error region display unit configured to superimpose and display a measurement error region, on an image of the object; and a measurement-image imaging condition setting unit for adjusting an imaging condition for a striped image required for generation of the height image to reduce the measurement error region.
15 Citations
18 Claims
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1. A measurement microscope device comprising:
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a first measurement light projecting unit configured to irradiate an object with first measurement light from a first direction, the unit being a measurement light projecting unit for projecting measurement light as predetermined pattern structured illumination to the object from an oblique direction; an observation illumination light source for generating illumination light when capturing an observation image; an imaging unit for acquiring measurement light projected by the first measurement light projecting unit and reflected by the object to capture a plurality of striped images, and using the observation illumination light source to capture an observation image having texture information; a height image acquiring unit for acquiring a height image having height information based on the plurality of striped images; a stage on which the object is placed; a display unit for displaying the height image or the observation image; a measurement unit for performing measurement on the height image displayed on the display unit; an image connecting unit configured to, by moving the stage and capturing a different region including a connection margin by the imaging unit, acquire a plurality of height images for connection and observation images for connection, and connect the obtained plurality of height images for connection and observation images for connection to generate a connected image; a measurement error region display unit configured to superimpose and display a measurement error region, where a result of measurement of the height is error, on an image of the object corresponding to each region to be connected by the image connecting unit; and a measurement-image imaging condition setting unit for adjusting an imaging condition for a striped image required for generation of the height image to reduce the measurement error region in a state where the measurement error region is displayed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. An image generating method using a measurement microscope device which includes
a first measurement light projecting unit configured to irradiate an object with first measurement light from a first direction, the unit being a measurement light projecting unit for projecting measurement light as predetermined pattern structured illumination to the object from an oblique direction, an observation illumination light source for generating illumination light when capturing an observation image, an imaging unit for acquiring measurement light projected by the first measurement light projecting unit and reflected by the object to capture a plurality of striped images, and using the observation illumination light source to capture an observation image having texture information, a height image acquiring unit for acquiring a height image having height information based on the plurality of striped images, a stage on which the object is placed, a display unit for displaying the height image or the observation image, and a measurement unit for performing measurement on the height image displayed on the display unit, the method comprising the steps of: -
moving the stage and capturing a different region including a connection margin by the imaging unit to acquire a height image for connection and an observation image for connection; superimposing and displaying a measurement error region, where a result of measurement of the height is error, on an image of the object corresponding to each region for connecting the height images for connection to one another; prompting, as necessary, adjustment of an imaging condition to an imaging condition that reduces the measurement error region in a state where the measurement error region is displayed; acquiring a height image for connection and an observation image for connection on the set imaging condition; and connecting the obtained plurality of height images for connection and observation images for connection to generate a connected image.
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18. A non-transitory computer readable medium that stores a program for a measurement microscope device which includes
a first measurement light projecting unit configured to irradiate an object with first measurement light from a first direction, the unit being a measurement light projecting unit for projecting measurement light as predetermined pattern structured illumination to the object from an oblique direction, an observation illumination light source for generating illumination light when capturing an observation image, an imaging unit for acquiring measurement light projected by the first measurement light projecting unit and reflected by the object to capture a plurality of striped images, and using the observation illumination light source to capture an observation image having texture information, a height image acquiring unit for acquiring a height image having height information based on the plurality of striped images, and a stage on which the object is placed, wherein when executed, the program performs: -
a display function for displaying the height image or the observation image; a measurement function for performing measurement on the height image displayed by the display function; an image connection function of moving the stage and capturing a different region including a connection margin by the imaging unit to acquire a height image for connection and an observation image for connection, and connecting the obtained plurality of height images for connection and observation images for connection to generate a connected image; a measurement error region display function of superimposing and displaying a measurement error region, where a result of measurement of the height is error, on an image of the object corresponding to each region for connecting the height images for connection to one another; and a function of prompting, as necessary, adjustment of an imaging condition to an imaging condition that reduces the measurement error region in a state where the measurement error region is displayed by the measurement error region display function.
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Specification