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Wide-band acoustically coupled thin-film BAW filter

  • US 9,294,069 B2
  • Filed: 04/21/2011
  • Issued: 03/22/2016
  • Est. Priority Date: 04/23/2010
  • Status: Active Grant
First Claim
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1. An acoustic filter comprising;

  • a stack of materials suitable for an acoustic filter, the stack comprising at least one piezoelectric layer,at least two resonators having a width and a gap between them and comprising electrodes on different sides of the piezoelectric layer, where the electrodes on at least one side of the piezoelectric layer are separated to form at least two resonator regions,wherein the stack of materials, width and gap between the separated electrodes being adapted to produce at least two distinct acoustic plate wave modes each contributing at least one lateral standing wave resonance in the acoustic filter,wherein a structure is adapted to trap the at least two distinct plate wave modes having a total of at least three lateral standing wave resonances in the acoustic filterwherein the piezoelectric layer is selected from symmetry group 6 mm, with their c-axis in a tilted orientation.

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