Method for high volume manufacture of electrochemical cells using physical vapor deposition
First Claim
1. A process comprising:
- forming a plurality of discrete electrochemical cells on a substrate such that a space between successive pairs of electrochemical cells increases along the length of the substrate in order to reduce physical stress on the substrate when the substrate is wound;
wherein each of the plurality of electrochemical cells on the substrate is formed by;
moving a substrate spooled between two reels in a first direction through a single deposition chamber;
depositing one of an anode layer and a cathode layer over the substrate in the single deposition chamber under a first set of deposition conditions;
moving the anode or cathode layer back into the single deposition chamber;
depositing an electrolyte layer over the anode or cathode layer within the single deposition chamber under a second set of deposition conditions;
moving the electrolyte layer back into the single deposition chamber; and
depositing the other of the anode layer and the cathode layer over the electrolyte layer within the single deposition chamber under a third set of deposition conditions, to form the electrochemical cell; and
wherein the cathode or anode layer is moved into the chamber in a second direction opposite to the first direction, and the electrolyte layer is moved into the chamber in the first direction.
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Abstract
Embodiments of the present invention relate to apparatuses and methods for fabricating electrochemical cells. One embodiment of the present invention comprises a single chamber configurable to deposit different materials on a substrate spooled between two reels. In one embodiment, the substrate is moved in the same direction around the reels, with conditions within the chamber periodically changed to result in the continuous build-up of deposited material over time. Another embodiment employs alternating a direction of movement of the substrate around the reels, with conditions in the chamber differing with each change in direction to result in the sequential build-up of deposited material over time. The chamber is equipped with different sources of energy and materials to allow the deposition of the different layers of the electrochemical cell.
81 Citations
14 Claims
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1. A process comprising:
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forming a plurality of discrete electrochemical cells on a substrate such that a space between successive pairs of electrochemical cells increases along the length of the substrate in order to reduce physical stress on the substrate when the substrate is wound; wherein each of the plurality of electrochemical cells on the substrate is formed by; moving a substrate spooled between two reels in a first direction through a single deposition chamber; depositing one of an anode layer and a cathode layer over the substrate in the single deposition chamber under a first set of deposition conditions; moving the anode or cathode layer back into the single deposition chamber; depositing an electrolyte layer over the anode or cathode layer within the single deposition chamber under a second set of deposition conditions; moving the electrolyte layer back into the single deposition chamber; and depositing the other of the anode layer and the cathode layer over the electrolyte layer within the single deposition chamber under a third set of deposition conditions, to form the electrochemical cell; and
wherein the cathode or anode layer is moved into the chamber in a second direction opposite to the first direction, and the electrolyte layer is moved into the chamber in the first direction. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A process for forming solid state battery cells using a reel to reel process apparatus, the process comprising:
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forming a plurality of discrete solid state battery cells on a substrate such that a space between successive pairs of battery cells increases along the length of the substrate, in order to reduce physical stress on the substrate when the substrate is wound; wherein each of the plurality of battery cells on the substrate is formed by; moving a substrate in a first direction through a deposition chamber, the substrate being spooled between at least a pair of reels, the reels being configured to rotate and move the substrate in the first direction through the deposition chamber and under a control of a computing system; performing a plurality of processes to sequentially deposit a plurality of different materials derived from a respective plurality of material sources in the deposition chamber to form a resulting electrochemical cell overlying the substrate, the plurality of processes comprising at least; depositing a first current collector overlying the substrate; depositing a first electrode layer that is capable of an electrochemical reaction with ions overlying the first current collector in the deposition chamber; depositing an electrolyte material overlying the first electrode layer that is capable of ionic diffusion, the electrolyte material having an electrical conductivity and being a solid state material; depositing a second electrode layer overlying the electrolyte material; depositing a second current collector overlying the second electrode layer; moving the resulting electrochemical cell from the deposition chamber; and collecting the resulting electrochemical cell as a roll, wherein the deposition chamber is a single chamber, and the processes for forming the resulting electrochemical cell are performed in the single chamber. - View Dependent Claims (8, 9)
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10. A process comprising:
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forming a plurality of discrete solid state battery cells on a substrate such that a space between successive pairs of battery cells increases along the length of the substrate, in order to reduce physical stress on the substrate when the substrate is wound; wherein each of the plurality of battery cells on the substrate is formed by; moving a substrate spooled between two reels in a first direction through a deposition chamber, the deposition chamber being configured to perform a first set of deposition conditions, a second set of deposition conditions, and a third set of deposition conditions; depositing a first electrode layer overlying the substrate in the deposition chamber using at least one of the first set of deposition conditions, the second set of deposition conditions, or the third set of deposition conditions; depositing a first current collector within a vicinity of the first electrode layer in the deposition chamber using at least one of the first set of deposition conditions, the second set of deposition conditions, or the third set of deposition conditions; depositing an electrolyte material in the deposition chamber using at least one of the first set of deposition conditions, the second set of deposition conditions, or the third set of deposition conditions, the electrolyte material overlying the first electrode layer that is capable of ionic diffusion, the electrolyte material being configured as a solid state material; depositing a second electrode layer overlying the electrolyte material in the deposition chamber to form a resulting electrochemical cell; moving the resulting electrochemical cell from the deposition chamber; and collecting a roll from the deposition chamber, wherein the deposition chamber is a single chamber, and the processes for forming the resulting electrochemical cell are performed in the single chamber. - View Dependent Claims (11, 12, 13, 14)
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Specification