Electromechanical transducer, liquid droplet discharge head, and image forming apparatus
First Claim
1. An electromechanical transducer comprising:
- a substrate;
a diaphragm formed on the substrate; and
a piezoelectric element including;
a lower electrode;
a piezoelectric member; and
an upper electrode, whereina lower electrode film to form the lower electrode, a piezoelectric film to form the piezoelectric member, and an upper electrode film to form the upper electrode are laminated in a layering direction in layers on the diaphragm formed on the substrate;
the piezoelectric element is formed such that the lower electrode film, the piezoelectric member film, and the upper electrode film are patterned to form the lower electrode, the piezoelectric member, and the upper electrode, each of which has a desired pattern; and
in a plan view in the layering direction, corners of the lower electrode are rounded.
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Accused Products
Abstract
An electromechanical transducer includes a substrate; a diaphragm formed on the substrate; and a piezoelectric element that includes a lower electrode; a piezoelectric member; and an upper electrode, in which a lower electrode film to form the lower electrode, a piezoelectric film to form the piezoelectric member, and an upper electrode film to form the upper electrode are laminated in layers on the diaphragm formed on the substrate. The piezoelectric element is formed such that the lower electrode film, the piezoelectric member film, and the upper electrode film are patterned to form the lower electrode, the piezoelectric member, and the upper electrode, each of which has a desired pattern; and corners of the lower electrode are rounded.
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Citations
16 Claims
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1. An electromechanical transducer comprising:
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a substrate; a diaphragm formed on the substrate; and a piezoelectric element including; a lower electrode; a piezoelectric member; and an upper electrode, wherein a lower electrode film to form the lower electrode, a piezoelectric film to form the piezoelectric member, and an upper electrode film to form the upper electrode are laminated in a layering direction in layers on the diaphragm formed on the substrate; the piezoelectric element is formed such that the lower electrode film, the piezoelectric member film, and the upper electrode film are patterned to form the lower electrode, the piezoelectric member, and the upper electrode, each of which has a desired pattern; and in a plan view in the layering direction, corners of the lower electrode are rounded. - View Dependent Claims (2, 3, 4, 5)
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6. An electromechanical transducer comprising:
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a substrate; a diaphragm formed on the substrate; and a piezoelectric element including; a lower electrode; a piezoelectric member; and an upper electrode, wherein a lower electrode film to form the lower electrode, a piezoelectric film to Irwin the piezoelectric member, and an upper electrode film to form the upper electrode are laminated in layers on the diaphragm formed on the substrate; the piezoelectric element is formed such that the lower electrode film, the piezoelectric member film, and the upper electrode film are patterned to form the lower electrode, the piezoelectric member, and the upper electrode, each of which has a desired pattern; and corners of the lower electrode are rounded, wherein a curvature radius of the rounded corners is not less than 5 [μ
m]. - View Dependent Claims (7, 8, 9, 10)
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11. An electromechanical transducer comprising:
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a substrate; a diaphragm formed on the substrate; and a piezoelectric element including; a lower electrode; a piezoelectric member; and an upper electrode, wherein a lower electrode film to form the lower electrode, a piezoelectric film to form the piezoelectric member, and an upper electrode film to form the upper electrode are laminated in layers on the diaphragm formed on the substrate; the piezoelectric element is formed such that the lower electrode film, the piezoelectric member film, and the upper electrode film are patterned to form the lower electrode, the piezoelectric member, and the upper electrode, each of which has a desired pattern; and corners of the lower electrode are rounded, wherein a peripheral portion of the lower electrode is tapered at an angle relative to the diaphragm. - View Dependent Claims (12, 13, 14, 15, 16)
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Specification