Bifacial tandem solar cells

• US 9,368,671 B2
• Filed: 10/06/2014
• Issued: 06/14/2016
• Est. Priority Date: 05/24/2010
• Status: Active Grant

• Current Assignee: Masimo Semiconductor Inc. (Masimo Corporation)
• Original Assignee: Masimo Semiconductor Inc. (Masimo Corporation)
• Inventors: Wojtczuk, Steven J., Chiu, Philip T., Zhang, Xuebing, Gagnon, Edward, Timmons, Michael
• Primary Examiner(s): Landau, Matthew
• Assistant Examiner(s): Anya, Igwe U
• Application Number:
  US14/507,607
• Publication Number:
  US 20150099324A1
• Time in Patent Office: 617 Days
• Field of Search: 257/53
• US Class Current: 1/1
• CPC Class Codes: H01L 31/0684 double emitter cells, e.g. bifacial solar cells
• CPC Class Codes: H01L 31/0687 Multiple junction or tandem solar cells
• CPC Class Codes: H01L 31/0693 the devices including, apart from doping material or other impurities, only AIIIBV compounds, e.g. GaAs or InP solar cells
• CPC Class Codes: H01L 31/1844 comprising ternary or quaternary compounds, e.g. Ga Al As, In Ga As P
• CPC Class Codes: Y02E 10/544 Solar cells from Group III-V materials
• CPC Class Codes: Y02E 10/547 Monocrystalline silicon PV cells

Abstract

A method of fabricating on a semiconductor substrate bifacial tandem solar cells with semiconductor subcells having a lower bandgap than the substrate bandgap on one side of the substrate and with subcells having a higher bandgap than the substrate on the other including, first, growing a lower bandgap subcell on one substrate side that uses only the same periodic table group V material in the dislocation-reducing grading layers and bottom subcells as is present in the substrate and after the initial growth is complete and then flipping the substrate and growing the higher bandgap subcells on the opposite substrate side which can be of different group V material.

Claims

1. A semiconductor device comprising:

a substrate having a first side and a second side opposite from the first side;

a lower bandgap subcell on the first side of the substrate, the lower bandgap subcell comprising a bottom subcell and grading layers, the bottom subcell and the grading layers comprising non-phosphorous materials and a first periodic table group V material;

a plurality of higher bandgap subcells on the second side of the substrate, the plurality of higher bandgap subcells comprising a second periodic table group V material; and

a protective layer on the lower bandgap subcell, the protective layer serving as a diffusion barrier to phosphorous and dopant atoms and being thermally expansion matched to the lower bandgap subcell,

wherein the lower bandgap subcell has a lower bandgap than a bandgap of the substrate, and the plurality of higher bandgap subcells have higher bandgaps than the bandgap of the substrate.

2. The semiconductor device of claim 1, wherein the substrate comprises a doped N-type GaAs substrate having a doping impurity concentration of less than 5×

10¹⁷ cm<sup>−

3</sup>.

3. The semiconductor device of claim 1, wherein the grading layers comprise In_x(Al_yGa_1-y)_1-xAs.

4. The semiconductor device of claim 1, wherein the bottom subcell comprises In_xGa_1-xAs.

5. The semiconductor device of claim 1, wherein the plurality of higher bandgap subcells comprise a first higher bandgap subcell, the first higher bandgap subcell comprising a N-on-P cell, the N-on-P cell comprising In_xGa_1-xAs or GaAs.

6. The semiconductor device of claim 5, wherein the plurality of higher bandgap subcells comprise a second higher bandgap subcell, the second higher bandgap subcell comprising In_xGa_1-xP or In_x(Al_yGa_1-y)_1-xP.

7. The semiconductor device of claim 1, wherein the first periodic table group V material comprises a periodic table group V material of the substrate.

8. The semiconductor device of claim 1, wherein the first periodic table group V material comprises the same periodic table group V material as the second periodic table group V material.

9. The semiconductor device of claim 1, wherein the first periodic table group V material comprises a different periodic table group V material than the second periodic table group V material.

10. The semiconductor device of claim 1, wherein the lower bandgap subcell is not lattice-matched to the substrate, and the plurality of higher bandgap subcells are lattice-matched to the substrate.

11. The semiconductor device of claim 1, wherein a first higher bandgap subcell of the plurality of higher bandgap subcells has a different bandgap than a second higher bandgap subcell of the plurality of higher bandgap subcells.

12. The semiconductor device of claim 1, in combination with an epitaxial reactor glovebox configured to flip the substrate before growth of one of the lower bandgap subcell and the plurality of higher bandgap subcells on the substrate and after growth of one of the lower bandgap subcell and the plurality of higher bandgap subcells on the substrate.

13. The semiconductor device of claim 1, wherein the protective layer has a thickness between 50 nm and 500 nm.

14. The semiconductor device of claim 13, wherein the thickness of the protective layer is 50 nm.

15. The semiconductor device of claim 13, wherein the thickness of the protective layer is 500 nm.

16. The semiconductor device of claim 13, wherein the protective layer comprises silicon nitride.