Touch screen and manufacturing method

• US 9,383,877 B2
• Filed: 12/18/2013
• Issued: 07/05/2016
• Est. Priority Date: 07/23/2013
• Status: Active Grant

• Current Assignee: BOE Technology Group Co., Ltd., Hefei Xinsheng Optoelectric Technology Co. Ltd. (BOE Technology Group Co., Ltd.)
• Original Assignee: BOE Technology Group Co., Ltd., Hefei Xinsheng Optoelectric Technology Co. Ltd. (BOE Technology Group Co., Ltd.)
• Inventors: Yang, Wenjuan, Gong, Weigang, Lu, Chengzhu, Lin, Jiahong, Wang, Xiaofeng
• Primary Examiner(s): Olson, Jason
• Application Number:
  US14/362,064
• Publication Number:
  US 20150253899A1
• Time in Patent Office: 930 Days
• Field of Search: 345/174
• US Class Current: 1/1
• CPC Class Codes: C23C 14/0641 Nitrides C23C14/0617 takes precedence
• CPC Class Codes: C23C 14/0676 Oxynitrides
• CPC Class Codes: C23C 14/08 Oxides C23C14/10 takes precedence
• CPC Class Codes: C23C 14/35 by application of a magnetic field, e.g. magnetron sputtering C23C14/3457 takes precedence
• CPC Class Codes: G06F 1/16 Constructional details or arrangements
• CPC Class Codes: G06F 2203/04103 Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
• CPC Class Codes: G06F 2203/04111 Cross over in capacitive digitiser, i.e. details of structures for connecting electrodes of the sensing pattern where the connections cross each other, e.g. bridge structures comprising an insulating layer, or vias through substrate
• CPC Class Codes: G06F 3/0443 using a single layer of sensing electrodes
• CPC Class Codes: G06F 3/0446 using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
• CPC Class Codes: G06F 3/0448 Details of the electrode shape, e.g. for enhancing the detection of touches, for generating specific electric field shapes, for enhancing display quality

Abstract

Embodiments of the present invention provide a touch screen and a manufacturing method thereof. The touch screen includes: a substrate, a plurality of first electrodes, a plurality of second electrodes and a blanking component. The blanking component at least includes a first blanking layer and a second blanking layer for reducing reflection of external light, wherein, the first blanking layer and the second blanking layer are different in density; the blanking component is arranged between the substrate and the bridging component; and the substrate is arranged between the blanking component and an external environment.

Claims

1. A touch screen, comprising:

a substrate;

a plurality of first electrodes extending in a first direction above the substrate; and

a plurality of second electrodes extending in a second direction above the substrate and disposed to intersect the first electrodes;

wherein the first electrode and the second electrode are insulated by an insulating layer in an intersection region;

at least one of the first electrode and the second electrode includes a first blanking layer and a second blanking layer, for reducing reflection of external light

wherein, the first electrode is comprised of a first blanking layer and second blanking layer;

the second electrode is comprised of another first blanking layer and another second blanking layer; and

the first blanking layer, the second blanking layer, the insulating layer, the another first blanking layer and the another second blanking layer are sequentially arranged in a direction away from the substrate.

2. The touch screen according to claim 1, further comprising a conducting layer in a region corresponding to at least one of the first electrode and the second electrode, so that the at least one of the first electrode and the second electrode is located between the conducting layer and the substrate.

3. The touch screen according to claim 1, wherein, the first blanking layer and the second blanking layer are in direct contact and satisfy formulas (1-1) and (1-2):

2n₁d₁=(2m₁−

1)λ

/2 

 

(1-1)

|2n₁d₁−

2n₂d₂|=(2m₂−

1)λ

/2 

 

(1-2)

wherein, n₁ is refractive index of the first blanking layer, d₁ is thickness of the first blanking layer, m₁ is any positive integer, n₂ is refractive index of the second blanking layer, d₂ is thickness of the second blanking layer, m₂is any positive integer, and λ

is wavelength of ambient light.

4. The touch screen according to claim 1, wherein, the second blanking layer is stacked on the first blanking layer, and an area of the first blanking layer is equal to an area of the second blanking layer.

5. A touch screen, comprising:

a substrate;

a plurality of first electrodes extending in a first direction above the substrate;

a plurality of second electrodes extending in a second direction above the substrate and disposed to intersect the first electrodes, wherein the first electrode and the second electrode are transparent electrodes;

the first electrodes are disconnected into a plurality of first sub-electrodes in intersection regions with the second electrodes, and any two adjacent first sub-electrodes within the same first electrode are electrically connected through a bridging component;

the bridging component is insulated from the second electrode by an insulating layer; and

a blanking component, at least including a first blanking layer and a second blanking layer for reducing reflection of external light, wherein the first blanking layer and the second blanking layer are different in density;

the blanking component is arranged between the substrate and the bridging component; and

the substrate is arranged between the blanking component and an external environment, wherein, the first blanking layer and the second blanking layer are in direct contact and satisfy formulas (1-1) and (1-2);

2n₁d₁=(2m₁−

1)λ

/2 

 

(1-1)

|2n₁d₁−

2n₂d₂|=(2m₂−

1)λ

/2 

 

(1-2)

wherein, n₁ is refractive index of the first blanking layer, d₁ is thickness of the first blanking layer, m₁ is any positive integer, n₂ is refractive index of the second blanking layer, d₂ is thickness of the second blanking layer, m₂ is any positive integer, and λ

is wavelength of ambient light.

6. The touch screen according to claim 5, wherein, a projection of the bridging component on the substrate is within a projection of the blanking component on the substrate.

7. The touch screen according to claim 5, wherein, the second blanking layer is stacked on the first blanking layer, and an area of the first blanking layer is equal to an area of the second blanking layer.

8. The touch screen according to claim 5, wherein, the bridging component is made from single metal or alloy, preferably molybdenum, aluminum, molybdenum alloy or aluminum alloy.

9. The touch screen according to claim 8, wherein, the first blanking layer and/or the second blanking layer are/is made from oxide, nitride or nitrogen oxide of at least one metal contained in the bridging component.

10. The touch screen according to claim 5, wherein, the first blanking layer and/or the second blanking layer are/is made from metal oxide, metal nitride, metal oxynitride, alloy oxide, alloy nitride or alloy oxynitride.

11. The touch screen according to claim 5, wherein, the second electrode, the insulating layer, the first blanking layer, the second blanking layer and the bridging component are sequentially arranged in above-mentioned order in a direction away from the substrate.

12. The touch screen according to claim 5, wherein, the first blanking layer, the second blanking layer, the bridging component, the insulating layer and the second electrode are sequentially arranged in above-mentioned order in a direction away from the substrate.

13. The touch screen according to claim 5, wherein, the blanking component is insulated from the first electrode;

and the first blanking layer, the second blanking layer, the second electrode, the insulating layer and the bridging component are sequentially arranged in the above-mentioned order in a direction away from the substrate.

14. The touch screen according to claim 5, wherein, a projection of the bridging component on the substrate is within a projection of the blanking component on the substrate.

15. A manufacturing method of a touch screen, comprising steps of:

forming a plurality of first electrodes and second electrodes disposed to intersect each other on a substrate;

disconnecting the first electrodes in regions intersecting with the second electrode to form a plurality of first sub-electrodes, wherein the first electrodes and the second electrodes are transparent electrodes;

forming a bridging layer for connecting any two adjacent first sub-electrodes within the same first electrode on the substrate;

sequentially forming a first blanking layer and a second blanking layer in a region corresponding to the bridging layer on the substrate, for reducing reflection of external light, wherein, the forming the first blanking layer and the second blanking layer includes;

forming the first blanking layer in a cavity containing oxygen, nitrogen or mixed gas thereof by taking a metal or an alloy as a target material through magnetron sputtering;

forming the second blanking layer in a cavity containing oxygen, nitrogen or mixed gas thereof by taking a metal or an alloy as a target material through magnetron sputtering;

wherein the gases filled into the cavity for forming the first blanking layer and the second blanking layer are of different types or are of same type but different in ventilation volume when the target materials for forming the first blanking layer and the second blanking layer are same.

16. The method according to claim 15, wherein, the first blanking layer and the second blanking layer are different in density;

and the blanking component is arranged between the substrate and the bridging component.

17. The method according to claim 16, wherein, the forming the first blanking layer and the second blanking layer includes:

forming the first blanking layer in a cavity containing oxygen, nitrogen or mixed gas thereof by taking a metal or an alloy as a target material through magnetron sputtering;

forming the second blanking layer in a cavity containing oxygen, nitrogen or mixed gas thereof by taking a metal or an alloy as a target material through magnetron sputtering;

wherein the gases filled into the cavity for forming the first blanking layer and the second blanking layer are of different types or are of same type but different in ventilation volume when the target materials for forming the first blanking layer and the second blanking layer are same.