Pressure sensor
First Claim
1. A pressure sensor comprising:
- a support section;
a film section supported by the support section, being deformable, and including a first film and a second film, the first film including a first region located in a central part and a second region located in a peripheral part around the first region, and the second film being provided on the first region; and
a strain sensing element provided on part of the second region and including;
a first magnetic layer with a magnetization changing in response to deformation of the second region;
a second magnetic layer; and
an intermediate layer provided between the first magnetic layer and the second magnetic layer.
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Accused Products
Abstract
According to one embodiment, a pressure sensor includes: a support section; a film section; and a strain sensing element. The film section is supported by the support section and deformable. The film section includes a first film and a second film. The first film includes a first region located in a central part and a second region located in a peripheral part around the first region. The second film is provided on the first region. The strain sensing element is provided on part of the second region. The strain sensing element includes a first magnetic layer; a second magnetic layer; and an intermediate layer. Magnetization of the first magnetic layer changes in response to deformation of the second region. The intermediate layer is provided between the first magnetic layer and the second magnetic layer.
11 Citations
20 Claims
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1. A pressure sensor comprising:
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a support section; a film section supported by the support section, being deformable, and including a first film and a second film, the first film including a first region located in a central part and a second region located in a peripheral part around the first region, and the second film being provided on the first region; and a strain sensing element provided on part of the second region and including; a first magnetic layer with a magnetization changing in response to deformation of the second region; a second magnetic layer; and an intermediate layer provided between the first magnetic layer and the second magnetic layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A pressure sensor comprising:
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a support section; a film section supported by the support section, being deformable, and including a first region located in a central part and a second region located in a peripheral part around the first region, material of the first region being different from material of the second region; and a strain sensing element provided on part of the second region and including; a first magnetic layer with a magnetization changing in response to deformation of the second region; a second magnetic layer; and an intermediate layer provided between the first magnetic layer and the second magnetic layer.
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19. A pressure sensor comprising:
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a support section; a film section supported by the support section, being deformable, and including a first region located in a central part and a second region located in a peripheral part around the first region, Young'"'"'s modulus of the first region being larger than Young'"'"'s modulus of the second region; and a strain sensing element provided on part of the second region and including; a first magnetic layer with a magnetization changing in response to deformation of the second region; a second magnetic layer; and an intermediate layer provided between the first magnetic layer and the second magnetic layer.
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20. A pressure sensor comprising:
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a support section; a film section supported by the support section, being deformable, and including a first region located in a central part and a second region located in a peripheral part around the first region, value of stress remaining in the first region being relatively more tensile than value of stress remaining in the second region; and a strain sensing element provided on part of the second region and including; a first magnetic layer with a magnetization changing in response to deformation of the second region; a second magnetic layer; and an intermediate layer provided between the first magnetic layer and the second magnetic layer.
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Specification