Dual chamber plasma etcher with ion accelerator

• US 9,431,269 B2
• Filed: 08/21/2015
• Issued: 08/30/2016
• Est. Priority Date: 07/11/2013
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Guha, Joydeep
• Primary Examiner(s): Deo, Duy
• Application Number:
  US14/832,539
• Publication Number:
  US 20150364339A1
• Time in Patent Office: 375 Days
• US Class Current: 1/1
• CPC Class Codes: C23F 4/00 Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
• CPC Class Codes: H01J 2237/334 Etching
• CPC Class Codes: H01J 37/32357 Generation remote from the workpiece, e.g. down-stream
• CPC Class Codes: H01J 37/32422 Arrangement for selecting ions or species in the plasma
• CPC Class Codes: H01J 37/32449 Gas control, e.g. control of the gas flow
• CPC Class Codes: H01L 21/3065 Plasma etching; Reactive-ion etching
• CPC Class Codes: H01L 21/31116 by dry-etching
• CPC Class Codes: H01L 21/31122 of layers not containing Si, e.g. PZT, Al2O3
• CPC Class Codes: H01L 21/31138 by dry-etching
• CPC Class Codes: H01L 21/32136 using plasmas
• CPC Class Codes: H01L 21/32139 using masks
• CPC Class Codes: H01L 21/67069 for drying etching

Abstract

The embodiments herein generally deal with semiconductor processing methods and apparatus. More specifically, the embodiments relate to methods and apparatus for etching a semiconductor substrate. A partially fabricated semiconductor substrate is provided in a reaction chamber. The reaction chamber is divided into an upper sub-chamber and a lower sub-chamber by a grid assembly. Plasma is generated in the upper sub-chamber, and the substrate is positioned in the lower sub-chamber. The grid assembly includes at least two grids, each of which is negatively biased, and each of which includes perforations which allow certain species to pass through. The uppermost grid is negatively biased in order to repel electrons. The lowermost grid is biased further negative (compared to the uppermost grid) in order to accelerate positive ions from the upper to the lower sub-chamber. Etching gas is supplied directly to the lower sub-chamber. The etching gas and ions react with the surface of the substrate to etch the substrate as desired.

Claims

1. A method of etching a substrate, comprising:

(a) receiving a substrate having removable material in a reaction chamber of a reactor,

(b) supplying a plasma generating gas above a grid assembly in the reaction chamber, the grid assembly comprising an uppermost grid and a lowermost grid, and generating a plasma from the plasma generating gas above the grid assembly,

(c) simultaneously applying a first negative bias and a second negative bias respectively to the uppermost and lowermost grids of the grid assembly, wherein the second negative bias applied to the lowermost grid is more negative than the first negative bias applied to the uppermost grid, and accelerating ions from the plasma through the grid assembly toward the substrate,

(d) supplying an etching gas below the grid assembly, and

(e) etching the substrate to remove at least a portion of the removable material,

wherein an area below the grid assembly is substantially free of plasma during operations (a)-(e).

2. The method of claim 1, wherein the first negative bias applied to the uppermost grid is between about −

0.5 to −

50 V.

3. The method of claim 1, wherein the second negative bias applied to the lowermost grid is between about −

0.5 to −

2000 V.

4. The method of claim 1, further comprising changing at least one of the first negative bias and the second negative bias during operation (c).

5. The method of claim 1, wherein the etching gas in operation (d) is supplied in pulses.

6. The method of claim 1, wherein the plasma generating gas comprises an inert gas.

7. The method of claim 1, wherein the plasma generating gas comprises a reactive gas.

8. The method of claim 1, wherein the removable material is selected from the group consisting of Fe, Mn, Ni, Mg, Pt, Pd, Co, Ru, Cu, Ir, and a combination thereof.

9. The method of claim 1, further comprising supplying a processing gas to the area below the grid assembly and reacting the processing gas with the removable material to form a reacted removable layer comprising a material selected from the group consisting of an oxide, a nitride, a hydride, a chloride, a fluoride, organometallic complexes, or a combination thereof.

10. The method of claim 9, further comprising reacting the reacted removable layer with the etching gas to remove the reacted removable layer.

11. The method of claim 1, further comprising moving at least one of the uppermost grid and the lowermost grid during at least one of operations (b)-(e).

12. The method of claim 11, wherein moving at least one of the uppermost grid and the lowermost grid results in a greater flux of ions to the substrate compared to prior to moving at least one of the uppermost grid and the lowermost grid.

13. The method of claim 11, wherein moving at least one of the uppermost grid and the lowermost grid results in a lower flux of ions to the substrate compared to prior to moving at least one of the uppermost grid and the lowermost grid.

14. The method of claim 11, wherein an ion flux on the substrate comprises a first ion flux near a center region of the substrate and a second ion flux toward a periphery of the substrate, wherein moving at least one of the uppermost grid and lowermost grid results in an increase in the first ion flux and a decrease in the second ion flux.

15. The method of claim 11, wherein an ion flux on the substrate comprises a first ion flux near a center region of the substrate and a second ion flux toward a periphery of the substrate, wherein moving at least one of the uppermost grid and the lowermost grid results in a decrease in the first ion flux and an increase in the second ion flux.

16. The method of claim 11, wherein moving at least one of the uppermost grid and the lowermost grid results in repeated pulsing of ion flux on the substrate.

17. The method of claim 16, wherein the ion flux on the substrate pulses between a first state and a second state, the first state being a high ion flux state and the second state being a low ion flux state.

18. The method of claim 17, wherein during the low ion flux state, there is no line of sight through the grid assembly, in a direction perpendicular to the uppermost and lowermost grids.

19. The method of claim 1, wherein the ions that accelerate through the grid assembly interact with a surface of the substrate.

20. The method of claim 1, wherein the first negative bias and the second negative bias applied respectively to the uppermost and lowermost grids are DC bias.