Non-planar glass polishing pad and method of manufacture
First Claim
1. A polishing pad for polishing a non-planar cover glass driven by a polishing carrier, the polishing pad comprising:
- a first porous microcellular foam layer and a second porous microcellular foam layer, wherein the first and second porous microcellular foam layers each comprise a hardness value of 10 to 30 Shore A, and wherein portions of the second porous microcellular foam layer are laminated on to the first porous microcellular foam layer;
an annular channel with an inside diameter and an outside diameter that are concentric about an axis of rotation of the polishing pad, the annular channel formed in the second porous microcellular foam layer, the annular channel having a channel surface that is recessed relative to other portions of the surface of a topside of the second porous microcellular foam layer;
a plurality of islands of microcellular foam located within the annular channel, the islands separate from one another, from the inside diameter, and from the outside diameter, and wherein each of the plurality of islands comprise an island surface that is raised relative to the channel surface; and
a polyurethane foam polishing layer, wherein the polyurethane foam polishing layer is laminated over the first and second porous microcellular foam layers, the annular channel and the islands of microcellular foam, wherein the polyurethane foam polishing layer is configured to contact the non-planar cover glass to be polished, wherein the polyurethane foam polishing layer conforms to the channel surface and creates a channel that provides surface contact with a non-planar portion of the non-planar cover glass.
1 Assignment
0 Petitions
Accused Products
Abstract
A polishing pad, for polishing of a work piece having portions that are non-planar, the polishing pad comprising a first side and a second side of the polishing pad. The first side is substantially flat, and the second side is configured to polish the non-planar work piece. The polishing pad further comprises a concentric annular channel in the polishing pad, wherein the concentric annular channel comprises a channel surface, wherein the second side of the polishing pad comprises an inner surface, the channel surface, and an outer surface, and wherein the channel surface is recessed relative to the inner surface and outer surface. The polishing pad further comprises a plurality of islands located within the concentric annular channel, wherein the islands comprise an island surface that is raised relative to the channel surface.
14 Citations
21 Claims
-
1. A polishing pad for polishing a non-planar cover glass driven by a polishing carrier, the polishing pad comprising:
-
a first porous microcellular foam layer and a second porous microcellular foam layer, wherein the first and second porous microcellular foam layers each comprise a hardness value of 10 to 30 Shore A, and wherein portions of the second porous microcellular foam layer are laminated on to the first porous microcellular foam layer; an annular channel with an inside diameter and an outside diameter that are concentric about an axis of rotation of the polishing pad, the annular channel formed in the second porous microcellular foam layer, the annular channel having a channel surface that is recessed relative to other portions of the surface of a topside of the second porous microcellular foam layer; a plurality of islands of microcellular foam located within the annular channel, the islands separate from one another, from the inside diameter, and from the outside diameter, and wherein each of the plurality of islands comprise an island surface that is raised relative to the channel surface; and a polyurethane foam polishing layer, wherein the polyurethane foam polishing layer is laminated over the first and second porous microcellular foam layers, the annular channel and the islands of microcellular foam, wherein the polyurethane foam polishing layer is configured to contact the non-planar cover glass to be polished, wherein the polyurethane foam polishing layer conforms to the channel surface and creates a channel that provides surface contact with a non-planar portion of the non-planar cover glass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
-
10. A polishing pad comprising:
-
a first porous microcellular foam layer; a second microporous foam layer laminated with pressure sensitive adhesive on both sides, wherein the second microporous foam layer is laminated to the first microporous foam layer, wherein the second microporous foam layer comprises an annular channel with an inside diameter and an outside diameter that are concentric about an axis of rotation of the polishing pad, and wherein the annular channel comprises a channel surface; a plurality of islands located within the annular channel, wherein each of the plurality of islands are separate from one another, from the inside diameter, and from the outside diameter, wherein each of the plurality of islands comprise an island surface that is raised relative to the channel surface; and a polyurethane foam polishing sheet that is laminated over the first and second microporous foam layers and over the plurality of islands and conforms to the channel surface and the island surface of each of the plurality of islands. - View Dependent Claims (11, 12)
-
-
13. A polishing pad for polishing of a substrate having portions that are non-planar, the polishing pad configured for use with a platen of a polishing machine, the polishing pad comprising:
-
a first side and a second side of the polishing pad, wherein the first side is substantially flat and configured to be attached to the platen for carrying the polishing pad, and wherein the second side is configured to polish the substrate having portions that are non-planar; an annular channel in the polishing pad, wherein the annular channel has an inside diameter and an outside diameter that are concentric about an axis of rotation of the polishing pad, wherein the annular channel comprises a channel surface, wherein the second side of the polishing pad comprises an inner surface, the channel surface, and an outer surface, and wherein the channel surface is recessed relative to the inner surface and outer surface; and a plurality of islands located within the annular channel, wherein each of the plurality of islands comprises an island surface that is raised relative to the channel surface, wherein the island surface is recessed relative to the inner and outer surfaces, wherein each of the plurality of islands are separate from one another, and wherein the island surface for each of the plurality of islands is separate from the inner surface, and from the outer surface. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21)
-
Specification