High integrity process fluid pressure probe

• US 9,442,031 B2
• Filed: 06/28/2013
• Issued: 09/13/2016
• Est. Priority Date: 06/28/2013
• Status: Active Grant

• Current Assignee: Rosemount Incorporated (Emerson Electric Company)
• Original Assignee: Rosemount Incorporated (Emerson Electric Company)
• Inventors: Hedtke, Robert C., Sittler, Fred C.
• Primary Examiner(s): Macchiarolo, Peter
• Assistant Examiner(s): JENKINS, JERMAINE L
• Application Number:
  US13/930,583
• Publication Number:
  US 20150000417A1
• Time in Patent Office: 1,173 Days
• Field of Search: None
• US Class Current: 1/1
• CPC Class Codes: G01L 19/0023 for flowthrough systems having a flexible pressure transmitting element
• CPC Class Codes: G01L 19/0046 using isolation membranes G01L13/026 and G01L19/0645 take precedence
• CPC Class Codes: G01L 19/0084 to the outside of the housing other details about the housing see G01L19/14
• CPC Class Codes: G01L 19/0645 using isolation membranes, specially adapted for protection
• CPC Class Codes: G01L 19/0672 Leakage or rupture protection or detection
• CPC Class Codes: G01L 9/0042 Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms details about the integration or bonding of piezoresistor in or on the diaphragm G01L9/0052 and G01L9/0057 respectively
• CPC Class Codes: G01L 9/0072 using variations in capacitance

Abstract

A process fluid pressure measurement probe includes a pressure sensor formed of a single-crystal material and mounted to a first metallic process fluid barrier and disposed for direct contact with a process fluid. The pressure sensor has an electrical characteristic that varies with process fluid pressure. A feedthrough is formed of a single-crystal material and has a plurality of conductors extending from a first end to a second end. The feedthrough is mounted to a second metallic process fluid barrier and is spaced from, but electrically coupled to, the pressure sensor. The pressure sensor and the feedthrough are mounted such that the secondary metallic process fluid barrier is isolated from process fluid by the first metallic process fluid barrier.

Claims

1. A process fluid pressure measurement probe comprising:

a pressure sensor formed of a single crystal material and mounted to a first metallic process fluid barrier and disposed for direct contact with a process fluid, the pressure sensor having an electrical characteristic that varies with process fluid pressure;

a feedthrough formed of a single crystal material and having a plurality of conductors extending from a first end to a second end, the feedthrough being mounted to a second metallic process fluid barrier and being spaced from, but electrically coupled to, the pressure sensor; and

wherein the pressure sensor and the feedthrough are mounted such that the secondary metallic process fluid barrier is isolated from process fluid by the first metallic process fluid barrier.

2. The process fluid pressure measurement probe of claim 1, wherein the pressure sensor is brazed to the first metallic process fluid barrier.

3. The process fluid pressure measurement probe of claim 1, wherein the single-crystal material is sapphire.

4. The process fluid pressure measurement probe claim 1, wherein the electrical characteristic is capacitance.

5. The process fluid pressure measurement probe of claim 1, wherein the feedthrough is brazed to the second metallic process fluid barrier.

6. The process fluid pressure measurement probe of claim 1, wherein the feedthrough includes a second sensor configured to detect failure of the first metallic process fluid pressure barrier.

7. The process fluid pressure measurement probe of claim 6, wherein the second sensor is a pressure sensor.

8. The process fluid pressure measurement probe of claim 1, wherein the first metallic process fluid pressure barrier is welded to an outer metal conduit that is sized to pass through an aperture in a conduit of the process fluid.

9. The process fluid pressure measurement probe of claim 8, wherein the second metallic process fluid barrier is welded to an inner metal conduit sized to fit within the outer metal conduit.

10. The process fluid pressure measurement probe of claim 9, and further comprising a weld ring welded to the inner metal conduit and the outer metal conduit.

11. The process fluid pressure measurement probe of claim 10, wherein the inner metal conduit is formed of a different metal than the outer metal conduit.

12. The process fluid pressure measurement probe of claim 9, and further comprising a sensor assembly tube welded to the first process barrier and to the second process barrier.

13. The process fluid pressure measurement probe of claim 12, and further comprising a process interface screen welded to the first metallic process fluid barrier.

14. A process fluid pressure measurement system comprising:

a process pressure transmitter configured to measure an electrical characteristic of at least one pressure sensor and provide a process pressure output over a process communication loop related to the at least one measurement;

a process fluid pressure measurement probe coupled to the process pressure transmitter, the process fluid pressure measurement probe including;

a pressure sensor formed of a single crystal material and mounted to a first metallic process fluid barrier and disposed for direct contact with a process fluid, the pressure sensor having an electrical characteristic that varies with process fluid pressure;

a feedthrough formed of a single crystal material and having a plurality of conductors extending from a first end to a second end, the feedthrough being mounted to a second metallic process fluid barrier and being spaced from, but electrically coupled to, the pressure sensor; and

wherein the pressure sensor and the feedthrough are mounted such that the secondary metallic process fluid barrier is isolated from process fluid by the first metallic process fluid barrier.

15. The process fluid pressure measurement system of claim 14 and further comprising a second process fluid pressure measurement probe coupled to the process fluid pressure transmitter, the second process fluid pressure measurement probe including:

a pressure sensor formed of a single crystal material and mounted to a first metallic process fluid barrier and disposed for direct contact with a process fluid, the pressure sensor having an electrical characteristic that varies with process fluid pressure;

a feedthrough formed of a single crystal material and having a plurality of conductors extending from a first end to a second end, the feedthrough being mounted to a second metallic process fluid barrier and being spaced from, but electrically coupled to, the pressure sensor; and

wherein the pressure sensor and the feedthrough of the second process fluid measurement probe are mounted such that the secondary metallic process fluid barrier is isolated from process fluid by the first metallic process fluid barrier.

16. The process fluid pressure measurement system of claim 15, wherein the pressure sensor also includes a temperature sensitive element that provides an indication of process fluid temperature to the process fluid pressure transmitter.

17. A process fluid pressure measurement probe comprising:

a pressure sensor mounted to a first metallic process fluid barrier and having an electrical characteristic that varies with process fluid pressure;

a feedthrough formed of a single crystal material and having a plurality of conductors extending from a first end to a second end, the feedthrough being mounted to a second metallic process fluid barrier and being spaced from, but electrically coupled to, the pressure sensor; and

wherein the pressure sensor and the feedthrough are mounted such that the secondary metallic process fluid barrier is isolated from process fluid by the first metallic process fluid barrier.

18. The process fluid pressure measurement probe of claim 17, wherein the pressure sensor is formed of a single crystal material.

19. The process fluid pressure measurement probe of claim 17, wherein the pressure sensor is adapted for direct contact with a process fluid.