High integrity process fluid pressure probe

  • US 9,442,031 B2
  • Filed: 06/28/2013
  • Issued: 09/13/2016
  • Est. Priority Date: 06/28/2013
  • Status: Active Grant
First Claim
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1. A process fluid pressure measurement probe comprising:

  • a pressure sensor formed of a single crystal material and mounted to a first metallic process fluid barrier and disposed for direct contact with a process fluid, the pressure sensor having an electrical characteristic that varies with process fluid pressure;

    a feedthrough formed of a single crystal material and having a plurality of conductors extending from a first end to a second end, the feedthrough being mounted to a second metallic process fluid barrier and being spaced from, but electrically coupled to, the pressure sensor; and

    wherein the pressure sensor and the feedthrough are mounted such that the secondary metallic process fluid barrier is isolated from process fluid by the first metallic process fluid barrier.

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