Nano sensor

  • US 9,453,814 B2
  • Filed: 07/17/2015
  • Issued: 09/27/2016
  • Est. Priority Date: 04/06/2004
  • Status: Active Grant
First Claim
Patent Images

1. A device, comprising:

  • an upper metallic layer,a lower layer,a nano sensor array positioned between the upper and lower layers to detect a presence of a gas, a chemical, or a biological object, wherein each sensor'"'"'s electrical characteristic changes when encountering the gas, chemical or biological object, anda matrix film on the nano sensor array wherein a physical parameter of the matrix film changes to measure gas or liquid concentration.

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