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Ultrasonic MEMS transmitter

  • US 9,457,379 B2
  • Filed: 03/11/2013
  • Issued: 10/04/2016
  • Est. Priority Date: 12/10/2012
  • Status: Active Grant
First Claim
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1. A transmitter comprising:

  • a drum;

    a membrane coupled to the drum;

    a first electrode coupled to the drum;

    a second electrode coupled to the membrane; and

    a plurality of posts disposed within the drum, wherein the plurality of posts have non-uniform heights such that;

    while the membrane is in a first configuration, a first post of the plurality of posts causes the membrane to have a first length; and

    while the membrane is in a second configuration, a second post of the plurality of posts causes the membrane to have a second length, different from the first length;

    wherein the membrane is configured to transmit an ultrasonic signal at a first frequency, corresponding to the first length, when a signal having a first DC voltage component is applied to the first electrode, and wherein the membrane is configured to transmit an ultrasonic signal at a second frequency, corresponding to the second length, when a signal having a second DC voltage component is applied to the first electrode.

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