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Micro-miniature implantable coated device

  • US 9,492,670 B2
  • Filed: 10/25/2007
  • Issued: 11/15/2016
  • Est. Priority Date: 02/01/2005
  • Status: Active Grant
First Claim
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1. A method of making a micro-miniature implantable device, comprising:

  • providing a micro-miniature device including contact pads;

    coating a least a major portion of said device, excluding a portion of the contact pads, with a thin electrically insulating conformal patterned inorganic hermetic layer about 10 microns thick, having an outside surface; and

    limiting oxygen degradation of said electrically insulating conformal patterned inorganic hermetic layer by coating only said outside surface of said thin insulating conformal inorganic hermetic layer, and not the contact pads, with a conformal patterned metal layer between 0.3 and 7 microns thick;

    attaching wires to the contact pad portion excluded from coating, wherein the wires pass straight through the inorganic hermetic layer and the conformal patterned metal layer; and

    wherein the thin electrically insulating conformal inorganic hermetic patterned layer and the contact pads form a hermetic seal around the micro-miniature device.

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