Predicting pattern critical dimensions in a lithographic exposure process

• US 9,529,253 B2
• Filed: 08/16/2013
• Issued: 12/27/2016
• Est. Priority Date: 06/23/2011
• Status: Active Grant

• Current Assignee: Nikon Precision Incorporated (Nikon Corporation)
• Original Assignee: Nikon Precision Incorporated (Nikon Corporation)
• Inventors: Tyminski, Jacek K., Popescu, Raluca
• Primary Examiner(s): Levin, Naum B
• Application Number:
  US13/969,092
• Publication Number:
  US 20130339910A1
• Time in Patent Office: 1,229 Days
• US Class Current: 1/1
• CPC Class Codes: G03F 1/70 Adapting basic layout or design of masks to lithographic process requirements, e.g., second iteration correction of mask patterns for imaging
• CPC Class Codes: G03F 7/70558 Dose control, i.e. achievement of a desired dose
• CPC Class Codes: G03F 7/70625 Dimensions, e.g. line width, critical dimension [CD], profile, sidewall angle or edge roughness
• CPC Class Codes: G03F 7/70641 Focus

Abstract

A method for predicting pattern critical dimensions in a lithographic exposure process includes defining relationships between critical dimension, defocus, and dose. The method also includes performing at least one exposure run in creating a pattern on a wafer. The method also includes creating a dose map. The method also includes creating a defocus map. The method also includes predicting pattern critical dimensions based on the relationships, the dose map, and the defocus map.

Claims

1. A method, comprising exposing patterns on a wafer to radiation and predicting a critical dimension map of the patterns exposed on a wafer by a scanner which generates signals during the exposure of the patterns on the wafer, the critical dimension map being predicted from the signals generated by the scanner during exposure of the patterns on the wafer, wherein the critical dimension map is predicted in situ with respect to the scanner, and further comprising creating a dose map and a defocus map, wherein the critical dimension map is predicted using the dose map and the defocus map.

2. The method of claim 1, wherein the signals are representative of exposure dose during the exposure of the wafer.

3. The method of claim 1, wherein the signals are representative of defocus during the exposure of the wafer.

4. The method of claim 1, wherein the signals are representative of lens thermal loads during the exposure of the wafer.

5. The method of claim 1, wherein the signals are representative of mechanical movement of stages of the scanner during the exposure of the wafer.

6. The method of claim 1, wherein the predicting the critical dimension map comprises defining at least one relationship between a critical dimension of the pattern exposed on the wafer and the scanner defocus during the exposure of the patterns on the wafer.

7. The method of claim 1, wherein predicting the critical dimension map comprises defining at least one relationship between a critical dimension of the pattern exposed on the wafer and the scanner dose during the exposure of the patterns on the wafer.

8. The method of claim 1, wherein predicting the critical dimension map comprises defining at least one relationship between a critical dimension of the pattern exposed on the wafer and mechanical movement of stages of the scanner during the exposure of the patterns on the wafer.

9. The method of claim 1, wherein predicting the critical dimension map comprises defining at least one relationship between a critical dimension of the pattern exposed on the wafer and the scanner lens thermal loads during the exposure of the patterns on the wafer.

10. The method of claim 1, wherein predicting the critical dimension map comprises creating a dose map from the signals generated by the scanner during the exposure of the patterns on the wafer.

11. The method of claim 1, wherein predicting the critical dimension map comprises creating a defocus map from the signals generated by the scanner during the exposure of the patterns on the wafer.

12. The method of claim 1, wherein predicting the critical dimension map comprises creating a lens thermal loads map from the signals generated by the scanner during the exposure of the patterns on the wafer.

13. The method of claim 1, wherein predicting the critical dimension map comprises creating a map of mechanical movement of stages of the scanner from signals generated by the scanner during the exposure of the patterns on the wafer.

14. The method of claim 1, wherein predicting the critical dimension map further comprises generating, in situ to the scanner, the critical dimension map from a combination of:

(i) a predefined relationship between a critical dimension of the pattern exposed on the wafer and at least one of the following characteristics of the scanner;

defocus;

dose;

thermal loads; and

of mechanical movement of stages of the scanner; and

(ii) one or more dose, defocus, thermal load and mechanical operation map or maps created from the signals generated by the scanner during the exposure of the patterns on the wafer.

15. A system for predicting pattern critical dimensions in a lithographic exposure process which exposes patterns on a wafer to radiation, comprising:

a computing device configured to predict a critical dimension map of the patterns exposed on a wafer by a scanner which generates signals during the exposure of the patterns on the wafer, the critical dimension map being predicted from the signals generated by the scanner during the exposure of the patterns on the wafer,

wherein the critical dimension map is predicted in situ with respect to the scanner, and

wherein the critical dimension map is predicted using a dose map and a defocus map.

16. The system of claim 15, wherein the signals are representative of at least one of:

exposure dose during the exposure of the wafer, and defocus during the exposure of the wafer.

17. A computer program product comprising program code stored in a computer readable medium that, when executed on a computing device, in conjunction with a lithographic exposure process which exposes patterns on a wafer to radiation, causes the computing device to:

predict a critical dimension map of patterns exposed on a wafer by a scanner which generates signals during the exposure of the patterns on the wafer, the critical dimension map being predicted from signals generated by the scanner during exposure of the patterns on the wafer,

wherein the critical dimension map is predicted using a dose map and a defocus map.

18. The computer program product of claim 17, wherein:

the signals are representative of at least one of;

the scanner exposure dose during the exposure of the wafer, and the scanner defocus during the exposure of the wafer; and

the critical dimension map is predicted in situ with respect to the scanner.