Methods of forming parts using laser machining

• US 9,533,376 B2
• Filed: 01/15/2014
• Issued: 01/03/2017
• Est. Priority Date: 01/15/2013
• Status: Active Grant

• Current Assignee: Microfabrica Incorporated (Technoprobe S.P.A.)
• Original Assignee: Microfabrica Incorporated (Technoprobe S.P.A.)
• Inventors: Veeramani, Arun S., Jensen, Heath A., Frodis, Uri, Wiita, Christopher G., Lockard, Michael S., Boguslavsky, Irina, Lembrikov, Pavel, Smalley, Dennis R., Chen, Richard T.
• Primary Examiner(s): PAIK, SANG YEOP
• Application Number:
  US14/156,437
• Publication Number:
  US 20140197145A1
• Time in Patent Office: 1,084 Days
• Field of Search: 2191216-12183
• US Class Current: 1/1
• CPC Class Codes: B23K 2101/40 Semiconductor devices
• CPC Class Codes: B23K 2103/50 Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
• CPC Class Codes: B23K 26/0624 using ultrashort pulses, i.e. pulses of 1ns or less
• CPC Class Codes: B23K 26/18 using absorbing layers on the workpiece, e.g. for marking or protecting purposes
• CPC Class Codes: B23K 26/38 by boring or cutting
• CPC Class Codes: B23K 26/40 taking account of the properties of the material involved
• CPC Class Codes: G01R 1/06738 related to tip portion
• CPC Class Codes: G01R 1/06744 Microprobes, i.e. having dimensions as IC details
• CPC Class Codes: G01R 3/00 Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments , e.g. of probe tips

Abstract

Embodiments are directed to the formation micro-scale or millimeter scale structures or method of making such structures wherein the structures are formed from at least one sheet structural material and may include additional sheet structural materials or deposited structural materials wherein all or a portion of the patterning of the structural materials occurs via laser cutting. In some embodiments, selective deposition is used to provide a portion of the patterning. In some embodiments the structural material or structural materials are bounded from below by a sacrificial bridging material (e.g. a metal) and possibly from above by a sacrificial capping material (e.g. a metal).

Claims

1. A method of forming at least one micro-scale or millimeter-scale structure, comprising:

a) providing at least one sheet of structural material having a front side and a backside;

b) using a laser beam to cut at least one opening completely through the at least one sheet from the front side to the back side in one or more regions to define at least one sheet material end of a structure to be formed;

c) depositing at least one single material layer or multi-material layer directly or indirectly onto at least a portion of both sides of the at least one sheet material such the at least one single material not only is located on at least selected locations on both sides of the at least one sheet material but also occupies at least a portion of a side wall of the at least one opening in the at least one sheet material;

d) locating a sacrificial material onto any exposed surface of the at least one single material layer or multi-material layer or onto a material that was previously deposited thereon;

e) using a laser beam to cut completely through the at least one sheet of structural material, the at least one single material or multi-material layer, and completely through the sacrificial material located on at least a front side of the at least one sheet of structural material and at least partially through the sacrificial material located on the back side of the at least one sheet of structural material;

f) removing the sacrificial material from the at least one single material layer or multi-material layer or other material that was previously deposited thereon, such that the structure is formed from a portion of the at least one sheet structural material and the at least a portion of the one single material layer or multi-material layers and wherein the at least one single material layer or multi-material layer defines a distal end of the structure or is located between a distal end of the structure and a distal end of the at least one sheet of structural material that forms part of the structure.