Three-dimensional nano-structure array

• US 9,556,018 B2
• Filed: 12/29/2011
• Issued: 01/31/2017
• Est. Priority Date: 10/06/2011
• Status: Active Grant

• Current Assignee: Hon Hai Precision Industry Co., Ltd., Tsinghua University
• Original Assignee: Hon Hai Precision Industry Co., Ltd., Tsinghua University
• Inventors: Zhu, Zhen-Dong, Li, Qun-Qing, Zhang, Li-Hui, Chen, Mo, Jin, Yuan-Hao, Fan, Shou-Shan
• Primary Examiner(s): Loney, Donald J
• Application Number:
  US13/340,194
• Publication Number:
  US 20130089709A1
• Time in Patent Office: 1,860 Days
• US Class Current: 1/1
• CPC Class Codes: B81C 1/00111 Tips, pillars, i.e. raised structures microneedles A61M37/0015
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: Y10T 428/24479 including variation in thickness
• CPC Class Codes: Y10T 428/2457 Parallel ribs and/or grooves

Abstract

A three-dimensional nano-structure array includes a substrate and a number of three-dimensional nano-structures. Each three-dimensional nano-structure has a first peak and a second peak aligned side by side. A first groove is defined between the first peak and the second peak. A second groove is defined between the two adjacent three-dimensional nano-structures. A depth of the first groove is lower than that of the second groove.

Claims

1. A three-dimensional nano-structure array, comprising:

a substrate having a plurality of three-dimensional nano-structures extending along the same direction, wherein each of the three-dimensional nano-structures has a first peak and a second peak aligned side by side, a first groove is defined between the first peak and the second peak, a second groove is defined between every two adjacent three-dimensional nano-structures of the three-dimensional nano-structures, and a first depth of the first groove is smaller than a second depth of the second groove, a width of each of the plurality of three-dimensional nano-structures ranges from about 100 nanometers to about 300 nanometers, the first peak and the second peak have a same height, the first depth of the first groove ranges from about 30 nanometers to about 120 nanometers, and the second depth of the second groove ranges from about 100 nanometers to about 200 nanometers;

wherein a first portion of the plurality of three-dimensional nano-structures are aligned along a first period P, a second portion of the plurality of three-dimensional nano-structures are aligned along a second period P′

, and P≠

P′

.

2. The three-dimensional nano-structure array of claim 1, wherein each three-dimensional nano-structure extends along a straight line, a curvy line, or a polygonal line.

3. The three-dimensional nano-structure array of claim 1, wherein a cross-section of each three-dimensional nano-structure is M-shaped.

4. The three-dimensional nano-structure array of claim 1, wherein a cross-section of the first peak is trapezoidal or triangular, and a cross-section of the second peak is trapezoidal or triangular.

5. The three-dimensional nano-structure array of claim 1, wherein the first peak comprises a first surface and a second surface intersected with each other to form a first include angle, and the second peak comprises a third surface and the fourth surface intersected with each other to form a second include angle, both the first include angle and the second include angle range from about 30 degrees to about 90 degrees.

6. The three-dimensional nano-structure array of claim 1, wherein both the first peak and the second peak have the highest point, a distance between the highest point of the first peak and the highest point of the second peak is smaller than the width of each three-dimensional nano-structure.

7. The three-dimensional nano-structure array of claim 1, wherein a distance between every two adjacent three-dimensional nanostructures of the three-dimensional nano-structures is substantially equal.

8. The three-dimensional nano-structure array of claim 7, wherein the distance between every two adjacent three-dimensional nanostructures of the three-dimensional nano-structures ranges from about 0 nanometers to about 200 nanometers.

9. The three-dimensional nano-structure array of claim 1, wherein the plurality of three-dimensional nano-structures is periodically aligned, and a period of the plurality of three-dimensional nano-structures ranges from about 100 nanometers to about 500 nanometers.

10. The three-dimensional nano-structure array of claim 1, wherein a cross-section of the first groove is V-shaped.

11. The three-dimensional nano-structure array of claim 1, wherein a cross-section of the second groove is V-shaped or inverse trapezium.

12. The three-dimensional nano-structure array of claim 1, wherein the plurality of three-dimensional nano-structures and the substrate are integrated to form an integrated structure.

13. The three-dimensional nano-structure array of claim 1, wherein the plurality of three-dimensional nano-structures is aligned side by side and extends to form a plurality of concentric circles.

14. The three-dimensional nano-structure array of claim 1, wherein the plurality of three-dimensional nano-structures is aligned side by side and extends to form a plurality of concentric rectangles.

15. The three-dimensional nano-structure array of claim 1, wherein the first groove, the second groove, the first peak and the second groove extend substantially along the same direction.

18. The three-dimensional nano-structure array of claim 1, wherein a ratio between the first depth and the second depth ranges from 1:

1.2 to 1;

3.

16. A three-dimensional nano-structure array, comprising:

a substrate comprising a surface, and a plurality of first grooves and a plurality of second grooves alternately defined in the surface, the plurality of first grooves and the plurality of second grooves extending substantially along the same direction, and a first depth of the first groove is lower than a second depth of the second groove, the first depth ranges from about 30 nanometers to about 120 nanometers, and the second depth ranges from about 100 nanometers to about 200 nanometers;

wherein a first portion of the plurality of three-dimensional nano-structures are aligned along a first period P, a second portion of the plurality of three-dimensional nano-structures are aligned along a second period P′

, and P≠

P′

.

17. A three-dimensional nano-structure array, comprising:

a substrate comprising a plurality of three-dimensional nano-structures, wherein the plurality of three-dimensional nano-structures are aligned side by side to form an array, and extend along the same direction, and a cross-section of each three-dimensional nano-structure is M-shaped, each of the plurality of three-dimensional nano-structures has a first peak and a second peak aligned side by side, the first peak and the second peak have a same height, a first groove is defined between the first peak and the second peak, a second groove is defined between every two adjacent three-dimensional nano-structures of the plurality of three-dimensional nano-structures, and a first depth of the first groove is smaller than a second depth of the second groove;

a width of each of the plurality of three-dimensional nano-structures ranges from about 100 nanometers to about 300 nanometers, a first depth of the first groove ranges from about 30 nanometers to about 120 nanometers, and a second depth of the second groove ranges from about 100 nanometers to about 200 nanometers;

wherein a distance between every two adjacent three-dimensional nano-structures of the plurality of three-dimensional nano-structures is periodically varied.