Pixel array of image sensor and method of fabricating the same
First Claim
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1. A pixel array of an image sensor, comprising:
- a first color pixel formed on a substrate and configured to sense light of a first optical spectrum;
a panchromatic pixel formed on the substrate and configured to sense light of a second optical spectrum; and
a planarization layer formed on the first color pixel and panchromatic pixel, wherein;
the panchromatic pixel and the planarization layer have an integrated structure which is formed in a same process using a planarization material; and
a range of the second optical spectrum is larger than a range of the first optical spectrum.
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Abstract
A pixel array of an image sensor includes multiple red, green, blue and panchromatic pixels. The red, green and blue pixels are formed on a substrate during a first process. Planarization material is deposited to form the panchromatic pixels on the substrate and to form a planarization layer on the red, green and blue pixels during the same second process subsequent to the first process. The planarization material of the panchromatic pixels and the planarization layer is characterized in high transmittance and high aspect ratio.
15 Citations
16 Claims
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1. A pixel array of an image sensor, comprising:
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a first color pixel formed on a substrate and configured to sense light of a first optical spectrum; a panchromatic pixel formed on the substrate and configured to sense light of a second optical spectrum; and a planarization layer formed on the first color pixel and panchromatic pixel, wherein; the panchromatic pixel and the planarization layer have an integrated structure which is formed in a same process using a planarization material; and a range of the second optical spectrum is larger than a range of the first optical spectrum. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of fabricating a pixel array of an image sensor, comprising:
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forming at least one color pixel on a substrate during a first process; and filling a planarization material during a second process to form a panchromatic pixel on the substrate and a planarization layer on the first color pixel and the panchromatic pixel, wherein; the at least one color pixel is configured to sense light of a first optical spectrum; the panchromatic pixel is configured to sense light of a second optical spectrum; and a range of the second optical spectrum is larger than a range of the first optical spectrum. - View Dependent Claims (13, 14, 15, 16)
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Specification