Optical filter and sensor system

  • US 9,588,269 B2
  • Filed: 05/18/2016
  • Issued: 03/07/2017
  • Est. Priority Date: 07/16/2012
  • Status: Active Grant
First Claim
Patent Images

1. An optical filter, comprising:

  • a filter stack comprising;

    a plurality of thin film hydrogenated silicon layers, wherein the plurality of thin film hydrogenated silicon layers have a refractive index of greater than 3 over a wavelength range of 800 nm to 1100 nm; and

    a plurality of thin film dielectric lower-refractive-index layers, wherein the plurality of thin film dielectric lower-refractive-index layers have a refractive index of less than 3 over the wavelength range of 800 nm to 1100 nm, and wherein the plurality of thin film dielectric lower-refractive-index layers alternate, in a one-to-one ratio, with the plurality of thin film hydrogenated silicon layers; and

    wherein the optical filter has exhibits interference that creates a passband at least partially overlapping with the wavelength range of 800 nm to 1100 nm,wherein the passband has a center wavelength that shifts by less than 20 nm in magnitude with a change in an incidence angle between 0°

    to 30°

    .

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