Acoustic resonator comprising aluminum scandium nitride and temperature compensation feature
First Claim
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1. An acoustic resonator structure, comprising:
- a first electrode disposed on a substrate;
a piezoelectric layer disposed on the first electrode and comprising aluminum scandium nitride;
a second electrode disposed on the piezoelectric layer; and
a temperature compensation feature having a temperature coefficient offsetting at least a portion of a temperature coefficient of the piezoelectric layer, the first electrode, or the second electrode; and
a planarization layer disposed over the substrate and abutting the first electrode, the planarization layer being substantially flush with the first electrode.
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Abstract
An acoustic resonator structure comprises a first electrode disposed on a substrate, a piezoelectric layer disposed on the first electrode and comprising aluminum scandium nitride, a second electrode disposed on the piezoelectric layer, and a temperature compensation feature having a temperature coefficient offsetting at least a portion of a temperature coefficient of the piezoelectric layer, the first electrode, and the second electrode.
108 Citations
23 Claims
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1. An acoustic resonator structure, comprising:
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a first electrode disposed on a substrate; a piezoelectric layer disposed on the first electrode and comprising aluminum scandium nitride; a second electrode disposed on the piezoelectric layer; and a temperature compensation feature having a temperature coefficient offsetting at least a portion of a temperature coefficient of the piezoelectric layer, the first electrode, or the second electrode; and a planarization layer disposed over the substrate and abutting the first electrode, the planarization layer being substantially flush with the first electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 21, 22)
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13. An acoustic resonator structure, comprising:
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a first electrode disposed on a substrate; a piezoelectric layer disposed on the first electrode and comprising a piezoelectric material combined with at least one rare earth element; a second electrode disposed on the piezoelectric layer; a temperature compensation feature having a temperature coefficient offsetting at least a portion of a temperature coefficient of the piezoelectric layer, the first electrode, or the second electrode; and a planarization layer disposed over the substrate and abutting the first electrode, the planarization layer being substantially flush with the first electrode. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 23)
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Specification