Method for filling at least one cavity of a multi-layer component with a filling material, and multi-layer component

• US 9,595,390 B2
• Filed: 07/31/2013
• Issued: 03/14/2017
• Est. Priority Date: 08/09/2012
• Status: Active Grant

• Current Assignee: TDK Electronics AG (TDK Corporation)
• Original Assignee: Epcos AG (TDK Corporation)
• Inventors: Somitsch, Dieter, Galler, Martin, Rajapurkar, Aditya
• Primary Examiner(s): FERGUSON, DION
• Application Number:
  US14/420,653
• Publication Number:
  US 20150235770A1
• Time in Patent Office: 1,322 Days
• US Class Current: 1/1
• CPC Class Codes: H01G 4/30 Stacked capacitors H01G4/33 takes precedence
• CPC Class Codes: H10N 30/053 by integrally sintering piezoelectric or electrostrictive bodies and electrodes
• CPC Class Codes: H10N 30/50 having a stacked or multilayer structure

Abstract

The invention relates to a method for filling at least one cavity (5a, 5b) of a multi-layer component (1) with filling material (9). In a first step, the method comprises providing a main body (2) of the multi-layer component (1), the main body (2) having at least one cavity (5a, 5b). In a subsequent step, the method comprises placing the main body (2) in a chamber (11) and then generating a first pressure, the first pressure being a negative pressure. Then, a filling material (9) is arranged on the main body (2). Furthermore, the invention relates to a multi-layer component (1). The multi-layer component (1) has a main body (2) with at least one cavity (5a, 5b), wherein the cavity (5a, 5b) is filled with a filling material (9) which has a viscosity of between 200 mPas and 2000 mPas.

Claims

1. A method for filling at least one cavity (5a, 5b) of a multi-layer component (1) with filling material (9), comprising the following steps:

A) providing a main body (2) of the multi-layer component (1), the main body (2) having at least one cavity (5a, 5b),

B) placing the main body (2) in a chamber (11),

C) generating a first pressure, the first pressure being a negative pressure,

D) arranging the filling material (9) on the main body (2).

2. The method according to claim 1, comprising the following step:

increasing the pressure in the chamber (11) to a second pressure after the main body (2) has been arranged in the filling material (9).

3. The method according to claim 2, wherein the pressure is increased by aerating the chamber (11).

4. The method according to either of claims 2 and 3, wherein the second pressure is an excess pressure.

5. The method according to claim 2, wherein filling material (9) is pressed into the at least one cavity (5a, 5b) by the increase in the pressure.

6. The method according to claim 1, wherein the filling material (9) has a viscosity of between 200 mPas and 2000 mPas.

7. The method according to claim 1, comprising the following step:

curing the filling material (9).

8. The method according to claim 1, wherein the at least one cavity (5a, 5b) is produced by an etching method.

9. The method according to claim 1, wherein the at least one cavity (5a, 5b) has a width of between 1 μ

m and 5 μ

m.

10. The method according to claim 1, wherein the main body (2) has at least one internal electrode layer (20a, 20b), and wherein the at least one cavity (5a, 5b) is arranged in a plane with the at least one internal electrode layer (20a, 20b).

11. The method according to claim 1, wherein the main body (2) has at least one outer contact-making means (3a, 3b), which is arranged on an outer side (6a, 6b) of the main body and which at least partially covers the at least one cavity (5a, 5b).

12. The method according to claim 11, wherein a diaphragm (17) is arranged at least partially over the at least one cavity (5a, 5b).

13. The method according to claim 12, wherein the diaphragm (17) together with the outer contact-making means (3a, 3b) covers a continuous region on the outer side (6a, 6b) of the main body (2), and wherein, in a region which lies next to the outer contact-making means (3a, 3b), the diaphragm (17) has a width (18) which is greater than the width (19) of a region of the outer side (6a, 6b) covered continuously by the outer contact-making means.

14. A multi-layer component comprising:

a main body (2) with at least one cavity (5a, 5b),

wherein the cavity (5a, 5b) is filled with a filling material (9) which has a viscosity of between 200 mPas and 2000 mPas,

wherein the at least one cavity (5a, 5b) has a width of between 1 μ

m and 5 μ

m, and

wherein the filling material (9) is free of air bubbles.