Method and apparatus for imaging three-dimensional structure

  • US 9,615,901 B2
  • Filed: 06/18/2015
  • Issued: 04/11/2017
  • Est. Priority Date: 08/05/1998
  • Status: Expired due to Fees
First Claim
Patent Images

1. An apparatus for determining surface topology of a portion of a three-dimensional structure, the apparatus comprising:

  • a probing member;

    an illumination unit configured to generate a plurality of incident light beams;

    an optical system configured to focus the plurality of incident light beams to a focal plane external to the probing member so as to illuminate the portion of the three-dimensional structure;

    a detector unit configured to measure a characteristic of a plurality of returned light beams generated from illuminating the portion of the three-dimensional structure with the plurality of incident light beams; and

    a processor coupled to the detector unit and configured to determine a surface topology of the portion of the three-dimensional structure based at least in part on the measured characteristic of the plurality of returned light beams.

View all claims
    ×
    ×

    Thank you for your feedback

    ×
    ×