Stationary vibration isolation system and method for controlling a vibration isolation system
First Claim
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1. A stationary vibration isolation system, comprising:
- a load that is anti-vibration mounted in a horizontal direction and vertical direction on a base and which comprises a moving mass;
wherein the vibration-isolated load is coupled to the base via a first damper which is effective in the horizontal direction and which comprises a first fluid of variable viscosity, andwherein viscosity of the first fluid of variable viscosity increases as a direct consequence of changes in motion of the load in a horizontal direction.
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Abstract
The invention relates to a stationary vibration isolation system and to a method for controlling such a system which comprises a damper effective in a horizontal direction which includes a fluid of variable viscosity.
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Citations
19 Claims
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1. A stationary vibration isolation system, comprising:
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a load that is anti-vibration mounted in a horizontal direction and vertical direction on a base and which comprises a moving mass; wherein the vibration-isolated load is coupled to the base via a first damper which is effective in the horizontal direction and which comprises a first fluid of variable viscosity, and wherein viscosity of the first fluid of variable viscosity increases as a direct consequence of changes in motion of the load in a horizontal direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for controlling a vibration isolation system, wherein said vibration isolation system comprises a lithography apparatus including a moving mass, wherein the method comprises:
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(a) passively damping, via a fluid of variable viscosity, at least some vibrations sourced from horizontal motion of the lithography apparatus; and (b) actively controlling, via actuators, at least some vibration sourced from an external environment, wherein, either directly or indirectly, due to said some vibrations sourced from horizontal motion of the lithography apparatus, viscosity of the fluid increases thereby stiffening the vibration isolation system and reducing an amount of vibration control provided by the actuators. - View Dependent Claims (10, 11, 12, 13)
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14. A stationary vibration isolation system, comprising
a load that is anti-vibration mounted in a horizontal direction and vertical direction on a base and which comprises a moving mass; -
a damper that comprises a fluid of variable viscosity, wherein the damper is effective in the horizontal direction for coupling at least some vibrations from the load to the base; and an actuator that actively reduces at least some vibrations sourced from an external environment and introduced into the stationary vibration isolation system, wherein the damper functions independently of the actuator. - View Dependent Claims (15, 16, 17, 18, 19)
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Specification