Optical inspection probe

• US 9,618,329 B2
• Filed: 05/19/2009
• Issued: 04/11/2017
• Est. Priority Date: 05/19/2008
• Status: Expired due to Fees

• Current Assignee: Renishaw PLC
• Original Assignee: Renishaw PLC
• Inventors: Weston, Nicholas John, McKendrick, Alexander David
• Primary Examiner(s): Geisel, Kara E
• Assistant Examiner(s): DECENZO, SHAWN H
• Application Number:
  US12/990,846
• Publication Number:
  US 20110058159A1
• Time in Patent Office: 2,884 Days
• Field of Search: 3562411, 3562371
• CPC Class Codes: G01B 11/007 feeler heads therefor
• CPC Class Codes: G01B 11/24 for measuring contours or curvatures

Abstract

An optical inspection probe for obtaining and providing images of an object to be inspected. The optical inspection probe comprises an imaging assembly for capturing an image of an object and an illumination assembly for producing a light beam directed toward the object. The optical inspection probe is configured such that the light beam converges to a focal point at a first focal plane.

Claims

1. A camera inspection probe for a coordinate measuring apparatus including a housing having an exterior window, the housing comprising:

an imaging assembly of the camera inspection probe that is configured to capture an image of an object at an object plane of the imaging assembly; and

an illumination assembly of the camera inspection probe that is configured to produce a light beam directed toward the object to illuminate the object, the light beam being directed toward the object plane,

wherein the light beam converges to a focal point at a first focal plane outside the housing, the focal point being between the exterior window and the object plane so as to be prior to intersection of the light beam with the object plane, and

wherein the imaging assembly is configured to obtain a focused image of a region of the object from reflected light of the light beam produced by the illumination assembly, at a point subsequent to the focal point of the light beam.

2. The camera inspection probe according to claim 1, wherein the focal point of the light beam is substantially coincident with the camera inspection probe'"'"'s imaging optical axis.

3. The camera inspection probe according to claim 1, wherein the light beam is directed from the camera inspection probe to the first focal plane along an illumination optical axis, the illumination optical axis being substantially coincident with the camera inspection probe'"'"'s imaging optical axis.

4. The camera inspection probe according to claim 1, wherein the location of the focal point of the light beam is adjustable relative to the camera inspection probe.

5. The camera inspection probe according to claim 4, wherein the illumination assembly comprises a moveable light source such that the location of the focal point of the light beam is adjustable relative to the camera inspection probe.

6. The camera inspection probe according to claim 4, further comprising at least one lens in the path of the light beam, the at least one lens being moveable along the path of the light beam such that the location of the focal point of the light beam is adjustable relative to the camera inspection probe.

7. The camera inspection probe according to claim 4, further comprising an adaptive optical element positioned in the path of the light beam, the optical properties of the adaptive optical element being alterable so as to change the location of the focal point of the light beam relative to the camera inspection probe.

8. The camera inspection probe according to claim 4, wherein the focal point, at its adjusted positions, remains substantially coincident with the camera inspection probe'"'"'s imaging optical axis.

9. The camera inspection probe according to claim 1, configured such that the light beam diverges from its focal point, the divergence of the light beam being selectively adjustable.

10. The camera inspection probe according to claim 1, configured such that the light beam diverges from its focal point to illuminate an illumination area at the object plane of the imaging assembly, the position of the illumination area being selectively adjustable.

11. The camera inspection probe according to claim 1, wherein the illumination assembly is provided with at least one optical element configured to control the size of the light beam.

12. The camera inspection probe according to claim 11, wherein the illumination assembly is provided with at least one optical element configured to provide a variety of beam sizes.

13. The camera inspection probe according to claim 12, wherein the at least one optical element is a variable size optical element.

14. The camera inspection probe according to claim 12, wherein the at least one optical element is a variable shape optical element.

15. The camera inspection probe according to claim 12, wherein at least two interchangeable optical elements are provided.

16. The camera inspection probe according to claim 11, wherein the at least one optical element is moveable.

17. The camera inspection probe according to claim 16, wherein the at least one optical element is moveable along the length of the light beam.

18. The camera inspection probe according to claim 16, wherein the at least one optical element is moveable within the light beam.

19. The camera inspection probe according to claim 11, wherein the at least one optical element is an aperture.

20. The camera inspection probe according to claim 1, wherein the camera inspection probe is a vision probe.

21. The camera inspection probe according to claim 1,

wherein the imaging assembly comprises an objective lens and the object plane, and

wherein the imaging assembly has a depth of field of not more than 1/100th of the distance between the objective lens and the object plane.

22. The camera inspection probe according to claim 1, wherein the imaging assembly has a depth of field of not more than 3 mm.

23. The camera inspection probe according to claim 1, wherein the camera inspection probe is a video inspection probe.

24. A method of inspecting a feature of an object, the method comprising:

taking a camera inspection probe mounted on a coordinate measuring apparatus, the camera inspection probe including a housing having an exterior window, the housing comprising;

(1) an imaging assembly of the camera inspection probe that is configured to capture an image of the feature to be inspected, and

(2) an illumination assembly of the camera inspection probe that is configured to produce a light beam directed toward the feature so as to illuminate the feature of the object, the light beam being directed toward an object plane of the imaging assembly, and the light beam converging at a focal point at a first focal plane between the exterior window and the object plane so as to be prior to intersection of the light beam with the object plane;

arranging the focal point of the light beam such that the light beam converges at its focal point prior to falling on the feature; and

obtaining by the imaging assembly at least one focused image of a region of the feature from reflected light of the light beam produced by the illumination assembly, at a point subsequent to the focal point of the light beam.

25. The method according to claim 24, wherein the feature is an opening in the object.

26. The method according to claim 25, wherein the method further comprises arranges the focal point of the light beam substantially at or prior to a mouth of the opening.

27. The method according to claim 24, wherein the feature is a bore of a turbine blade.

28. The method according to claim 24, wherein the camera inspection probe is a video inspection probe.

29. A camera inspection probe for a coordinate measuring apparatus including a housing having an exterior window, the housing comprising:

an imaging assembly of the camera inspection probe that is configured to capture an image of an object at an object plane of the imaging assembly; and

an illumination assembly of the camera inspection probe that is configured to produce a light beam directed toward the object to illuminate the object, the light beam being directed toward the object plane,

wherein the light beam converges to a focal point at a first focal plane outside the housing, the focal point being between the exterior window and the object plane so as to be prior to intersection of the light beam with the object plane,

wherein the imaging assembly is configured to obtain a focused image of a region of the object from reflected light of the light beam produced by the illumination assembly, at a point subsequent to the focal point of the light beam, and

wherein (i) the imaging assembly has a depth of field of not more than 1/100th of the distance between an objective lens of the imaging assembly and the object plane or (ii) the imaging assembly has a depth of field of not more than 5 mm.

30. The camera inspection probe according to claim 29, wherein the imaging assembly has a depth of field of not more than 1/100th of the distance between the objective lens of the imaging assembly and the object plane.

31. The camera inspection probe according to claim 29, wherein the imaging assembly has a depth of field of not more than 5 mm.

32. A method of inspecting an opening of an object, the method comprising:

taking a camera inspection probe mounted on a coordinate measuring apparatus, the camera inspection probe including a housing having an exterior window, the housing comprising;

(1) an imaging assembly of the camera inspection probe that is configured to capture an image of the opening to be inspected, and

(2) an illumination assembly of the camera inspection probe that is configured to produce a light beam directed toward the opening so as to illuminate the opening of the object, the light beam being directed toward an object plane of the imaging assembly, and the light beam converging at a focal point at a first focal plane between the exterior window and the object plane so as to be prior to intersection of the light beam with the object plane;

arranging the focal point of the light beam such that the light beam converges at its focal point prior to falling on the opening and such that the focal point is substantially at a mouth of the opening; and

obtaining by the imaging assembly at least one focused image of a region of the opening from reflected light of the light of the light beam produced by the illumination assembly, at a point subsequent to the focal point of the light beam.

33. The method according to claim 32, wherein the focal point of the light beam is arranged so that, at the mouth of the opening, the width of the light beam is less than that of the mouth.