Microwave resonator sensor and associated methods of sensing

• US 9,625,366 B2
• Filed: 11/11/2014
• Issued: 04/18/2017
• Est. Priority Date: 11/11/2013
• Status: Expired due to Fees

• Current Assignee: 3R Valo, Société En Commandite
• Original Assignee: 3R Valo, Société En Commandite
• Inventors: Domingue, Frederic, El Matbouly, Hatem
• Primary Examiner(s): NGUYEN, HOAI AN D
• Application Number:
  US14/537,994
• Publication Number:
  US 20150168314A1
• Time in Patent Office: 889 Days
• Field of Search: 324600, 324629, 324633, 324649, 324652, 324658, 324663, 324674, 324675, 324681, 324682, 324691, 324707, 324708, 324 7611, 324 7639, 324 7651
• CPC Class Codes: G01K 7/32 using change of resonant frequency of a crystal
• CPC Class Codes: G01N 15/06 Investigating concentration of particle suspensions by weighing G01N5/00; investigating sedimentation of particle suspensions G01N15/04; investigating individual particles G01N15/10
• CPC Class Codes: G01N 15/0606 by collecting particles on a support
• CPC Class Codes: G01N 15/0656 using electric, e.g. electrostatic methods or magnetic methods by investigating individual particles G01N15/1031, G01N15/12
• CPC Class Codes: G01N 2015/0046 in gas, e.g. smoke
• CPC Class Codes: G01N 22/04 Investigating moisture content
• CPC Class Codes: G01N 33/0036 Specially adapted to detect a particular component all the other sub-groups of G01N33/0004 take precedence

Abstract

The sensor for sensing at least a physical property of an environment generally has a microwave resonator having a top conductive layer, a bottom conductive layer and a substrate layer therebetween, the substrate layer being made of a first dielectric material, a fence electrically connecting the top conductive layer to the bottom conductive layer across the substrate layer, and enclosing at least one resonance cavity, at least one microwave signal port across the fence, at least one sensing portion of a second dielectric material functionalized to the physical property of the environment, extending in the at least one resonance cavity and being exposed to the environment across at least one of the top conductive layer and the bottom conductive layer, the microwave resonator having at least one resonance frequency being dependent of the exposure of the second dielectric material with the environment to affect a microwave signal resonating therein.

Claims

1. A sensor for sensing at least a physical property of an environment, the sensor comprising a microwave resonator having a top conductive layer, a bottom conductive layer and a substrate layer made of a first dielectric material sandwiched therebetween, a fence electrically connecting the top conductive layer to the bottom conductive layer across the substrate layer and enclosing at least one resonance cavity, at least one microwave signal port across the fence, at least one sensing portion having a second dielectric material functionalized to the physical property of the environment, the second dielectric material extending across the conductive layers and the at least one resonance cavity and being exposed to the environment during use of the sensor, the microwave resonator having at least one resonance frequency being dependent of the exposure to affect a microwave signal resonating therein.

2. The sensor of claim 1, wherein the at least one sensing portion includes an array of sensing portions, each provided in the form of a hole filled by the second dielectric material.

3. The sensor of claim 1, wherein the fence comprises a plurality of via holes electrically connecting the top conductive layer to the bottom conductive layer.

4. The sensor of claim 1, wherein the dielectric material associated to each of the at least one resonance cavity is sensitive to a physical property to sense.

5. The sensor of claim 2, wherein the resonance frequency associated to each of the at least one resonance cavity is dependent on a signature pattern in which the array of sensing portions is disposed.

6. The sensor of claim 1, wherein the fence partially encloses each of the at least one resonance cavity individually thereby forming resonance subcavities being connected in series along the microwave resonator.

7. The sensor of claim 1, wherein the at least one microwave signal port is used as a microwave output port.

8. The sensor of claim 1, wherein the at least one microwave signal port is electrically connected to at least one of the top conductive layer and the bottom conductive layer.

9. The sensor of claim 1, wherein the at least one microwave signal port is connected to an antenna for receiving the signal in a wireless communication link.

10. The sensor of claim 9, wherein the antenna is made integral to the top conductive layer of the microwave resonator.

11. The sensor of claim 1, wherein the physical property of the environment is a presence of a gas, a relative humidity, a temperature or a dust level.

12. The sensor of claim 1, wherein the conductive layers are made of a metallic material such as copper.

13. The sensor of claim 1, wherein the second dielectric material for sensing presence of hydrogen is tin dioxide.

14. The sensor of claim 1, wherein the second dielectric material for sensing humidity is air.

15. The sensor of claim 1, where the microwave resonator has a rectangular body.

16. The sensor of claim 15, wherein the at least one microwave signal port of the microwave resonator is located in the middle of an edge of the rectangular body.

17. The sensor of claim 1 further comprising a microwave output port for at least transmitting the signal.

18. The sensor of claim 1, wherein the at least a sensing portion of each of the at least one resonance cavity are located on at least a given high intensity area, the at least a given high intensity area being indicative of a high electric field therearound.

19. A method for sensing at least a physical property of an environment, the method comprising:

providing a path having an input and an output; and

a microwave resonator therebetween, the microwave resonator having a top conductive layer, a bottom conductive layer and a substrate layer therebetween, the top conductive layer being electrically connected to the bottom conductive layer by a conductive fence across the substrate layer, the fence enclosing at least one resonance cavity, the input being connected to the at least one resonance cavity across the fence, each of the at least one resonance cavity having at least one sensing portion of a second dielectric material functionalized to the physical property of the environment, extending in the at least one resonance cavity and being exposed to the environment across at least one of the top conductive layer and the bottom conductive layer, the microwave resonator having at least one resonance frequency;

propagating an input microwave signal into the input of the path, the microwave resonator transforming the input microwave signal into an output microwave signal being characterized by the at least one resonance frequency, the at least one resonance frequency being dependent of the exposure of the second dielectric material with the environment to affect a microwave signal resonating therein;

measuring the resonance frequency in the output microwave signal from the output of the path; and

sensing the at least a physical property based on the resonance frequency.

20. The method of claim 19, wherein said providing further comprises providing a two-dimensional pattern of sensing portions in at least one resonance cavity of the microwave resonator, each of the two-dimensional pattern of sensing portions imparting a signature resonance frequency to the microwave resonator.

21. The method of claim 20 further comprising associating the signature resonance frequency to a corresponding resonance cavity.

22. The method of claim 20, wherein the resonance frequency of each of the at least one resonance cavity is recognizable based on the two-dimensional pattern of sensing portions.

23. The method of claim 19, wherein said propagating further comprises receiving the input microwave signal via an antenna connected to the input.

24. The method of claim 23, wherein said propagating further comprises transmitting the output microwave signal using an antenna connected to the output.

25. A method of making a sensor for sensing at least a physical property of an environment, the method comprising:

providing a substrate layer made of a first dielectric material;

incorporating a layer of conductive material on the top of the substrate and a layer of conductive material on the bottom of the substrate;

forming a fence of through-holes surrounding a sensing portion except for an input area;

filling the through-holes with a conductive material thereby making an electrical link between the two layers of conductive material and enclosing at least one resonance cavity; and

processing a given configuration of holes across the resonance cavity, the holes being interspaced from one another in the sensing portion.

26. The method of claim 25 further comprising inserting a dielectric material inside the holes of at least an associated resonance cavity.