Vertical cavity surface emitting laser and atomic oscillator

• US 9,634,467 B2
• Filed: 12/18/2014
• Issued: 04/25/2017
• Est. Priority Date: 12/20/2013
• Status: Expired due to Fees

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Ono, Shoji, Takenaka, Satoshi, Kurachi, Yuji
• Primary Examiner(s): Manno, Jessica
• Assistant Examiner(s): FORDE, DELMA ROSA
• Application Number:
  US14/574,813
• Publication Number:
  US 20150180213A1
• Time in Patent Office: 859 Days
• Field of Search: 372107, 372 501, 372 5011, 372 50124
• CPC Class Codes: G04F 5/145 using Coherent Population Trapping
• CPC Class Codes: H01S 2301/176 Specific passivation layers on surfaces other than the emission facet
• CPC Class Codes: H01S 5/02345 Wire-bonding
• CPC Class Codes: H01S 5/04252 characterised by the material
• CPC Class Codes: H01S 5/04254 characterised by the shape
• CPC Class Codes: H01S 5/04257 having positive and negative electrodes on the same side of the substrate
• CPC Class Codes: H01S 5/0623 using the beating between two closely spaced optical frequencies, i.e. heterodyne mixing
• CPC Class Codes: H01S 5/0687 Stabilising the frequency of the laser
• CPC Class Codes: H01S 5/18311 using selective oxidation
• CPC Class Codes: H01S 5/18338 Non-circular shape of the structure
• CPC Class Codes: H01S 5/18347 Mesa comprising active layer
• CPC Class Codes: H01S 5/1835 Non-circular mesa
• CPC Class Codes: H01S 5/18352 Mesa with inclined sidewall
• CPC Class Codes: H01S 5/18355 having a defined polarisation
• CPC Class Codes: H01S 5/18372 by native oxidation
• CPC Class Codes: H01S 5/3201 incorporating bulkstrain effects, e.g. strain compensation, strain related to polarisation
• CPC Class Codes: H01S 5/423 having a vertical cavity

Abstract

A vertical cavity surface emitting laser includes: a laminated body; an insulation layer which is provided over at least a portion of the laminated body; an electrode of which at least a portion is provided over the laminated body; a pad; and a wiring which connects the electrode and the pad, wherein the laminated body includes a first mirror layer, an active layer, and a second mirror layer, the laminated body includes a first distortion imparting portion, a second distortion imparting portion, and a resonance portion which is provided between the first distortion imparting portion and the second distortion imparting portion, in a plan view, the electrode is provided so as to cover at least a portion of the resonance portion, in the plan view, a width of the wiring is greater than a width of the first distortion imparting portion and is smaller than a width of the electrode.

Claims

1. A vertical cavity surface emitting laser comprising:

a substrate;

a laminated body which is provided over the substrate;

an insulation layer which is provided over at least a portion of the laminated body;

an electrode of which at least a portion is provided over the laminated body;

a wire-bonded pad; and

a wiring which electrically connects the electrode and the pad,

wherein the laminated body includes a first mirror layer provided over the substrate, an active layer provided over the first mirror layer, and a second mirror layer provided over the active layer,

in a plan view, the laminated body includes a first distortion imparting portion, a second distortion imparting portion, and a resonance portion which is provided between and unitary with the first distortion imparting portion and the second distortion imparting portion and resonates light generated in the active layer, the first distortion imparting portion, the second distortion imparting portion, and the resonance portion each including portions of the first mirror layer, the active layer, and the second mirror layer, and

in the plan view, the insulation layer is provided so as to cover at least a portion of the first distortion imparting portion,

in the plan view, the electrode is provided so as to cover at least a portion of the resonance portion,

in the plan view, the wiring is provided so as to cover at least the entirety of a portion of the first distortion imparting portion in a width direction, and

in the plan view, a width of the wiring is greater than a width of the first distortion imparting portion and is smaller than a width of the electrode.

2. The vertical cavity surface emitting laser according to claim 1,

wherein, in the plan view, the first distortion imparting portion is covered with at least one of the electrode and the wiring.

3. The vertical cavity surface emitting laser according to claim 1,

wherein the first distortion imparting portion has a first width,

the second distortion imparting portion has a second width, and

the resonance portion has a third width which is greater than at least one of the first width and the second width.

4. An atomic oscillator comprising:

the vertical cavity surface emitting laser according to claim 1.

5. An atomic oscillator comprising:

the vertical cavity surface emitting laser according to claim 2.

6. An atomic oscillator comprising:

the vertical cavity surface emitting laser according to claim 3.