Pick-and-place tool

  • US 9,648,795 B2
  • Filed: 12/02/2014
  • Issued: 05/09/2017
  • Est. Priority Date: 09/15/2010
  • Status: Active Grant
First Claim
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1. A pick-and-place tool comprising:

  • a mounting head including,a die position determining unit including a camera, the die position determining unit configured to one of measure and detect an actual position of at least one die during a time between placement of the at least one die on a workpiece and picking up of a subsequent die for placement on the workpiece, the actual position of the at least one die being an actual position of the at least one die on the workpiece relative to at least one local alignment mark on the workpiece, whereinthe mounting head is configured to move together with the die position determining unit between a first position, at which the at least one die is picked up, and a second position at which the at least one die is placed on the workpiece,the pick-and-place tool is further configured to output position information for adjusting original pattern data associated with a pattern to be generated on the workpiece, the position information including (i) imaging data of the actual position of the at least one die, and (ii) local alignment data for the at least one die, the local alignment data including the measured or detected actual position of the at least one die on the workpiece relative to the at least one local alignment mark on the workpiece,the pick-and-place tool is further configured to output the position information to an external patterning tool, either directly or indirectly via a memory,the imaging data is obtained by the camera after the placement of the at least one die and while the mounting head is still in the second position at which the at least one die is placed on the workpiece, andthe die position determining unit is further configured to one of measure and detect the actual position of the at least one die while the mounting head is still in the second position at which the at least one die is placed on the workpiece, and without moving from the second position at which the at least one die is placed on the workpiece.

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