Temperable electrochromic devices

• US 9,723,723 B2
• Filed: 12/20/2013
• Issued: 08/01/2017
• Est. Priority Date: 03/31/2009
• Status: Active Grant

• Current Assignee: View Incorporated
• Original Assignee: View Incorporated
• Inventors: Rozbicki, Robert T., Pradhan, Anshu
• Primary Examiner(s): BRAYTON, JOHN JOSEPH
• Application Number:
  US14/137,750
• Publication Number:
  US 20140182125A1
• Time in Patent Office: 1,320 Days
• CPC Class Codes: C03B 27/012 by heat treatment, e.g. for crystallisation; Heat treatment of glass products before tempering by cooling C03B27/008, C03B27/016 take precedence
• CPC Class Codes: C03C 17/3417 all coatings being oxide coatings
• CPC Class Codes: C03C 21/002 to perform ion-exchange between alkali ions C03C21/005 takes precedence
• CPC Class Codes: C03C 2217/73 Anti-reflective coatings with specific characteristics
• CPC Class Codes: C03C 2217/94 Transparent conductive oxide layers [TCO] being part of a multilayer coating
• CPC Class Codes: C03C 2218/154 by sputtering
• CPC Class Codes: C03C 2218/355 Temporary coating
• CPC Class Codes: C23C 14/083 of refractory metals or yttrium
• CPC Class Codes: C23C 14/085 of iron group metals
• CPC Class Codes: C23C 14/185 by cathodic sputtering
• CPC Class Codes: C23C 14/568 Transferring the substrates through a series of coating stations C23C14/562 takes precedence
• CPC Class Codes: C23C 14/5806 Thermal treatment
• CPC Class Codes: C23C 14/5853 Oxidation
• CPC Class Codes: G02F 1/153 Constructional details
• CPC Class Codes: G02F 1/1533 structural features not otherwise provided for
• CPC Class Codes: G02F 1/155 Electrodes
• CPC Class Codes: G02F 2001/1555 Counter electrode
• CPC Class Codes: H05K 3/10 in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
• CPC Class Codes: Y10T 29/49124 On flat or curved insulated base, e.g., printed circuit, etc.

Abstract

This disclosure provides systems, methods, and apparatus for tempering or chemically strengthening glass substrates having electrochromic devices fabricated thereon. In one aspect, an electrochromic device is fabricated on a glass substrate. The glass substrate is then tempered or chemically strengthened. The disclosed methods may reduce or prevent potential issues that the electrochromic device may experience during the tempering or the chemical strengthening processes, including the loss of charge carrying ions from the device, redistribution of charge carrying ions in the device, modification of the morphology of materials included in the device, modification of the oxidation state of materials included in the device, and the formation of an interfacial region between the electrochromic layer and the counter electrode layer of the device that impacts the performance of the device.

Claims

1. A method of fabricating an electrochromic device on a glass substrate, the method comprising:

a) forming a lithium diffusion barrier on the glass substrate;

b) forming a first transparent conducting oxide layer on the glass substrate;

c) forming a stack on the first transparent conducting oxide layer, the stack comprising;

(i) an electrochromic layer comprising an electrochromic material; and

(ii) a counter electrode layer comprising a counter electrode material;

d) introducing lithium to the stack in excess of that required for the electrochromic device to operate in transitioning between optical states, wherein the lithium is introduced to the stack prior to tempering;

e) forming a second transparent conducting oxide layer on top of the stack of layers; and

f) tempering the glass substrate after operation e).

2. The method of claim 1, wherein introducing the lithium further comprises depositing a layer of lithium metal on the first transparent conducting oxide layer, the electrochromic layer or the counter electrode layer.

3. The method of claim 1,

wherein forming the stack further comprises forming an ion conducting layer between the electrochromic layer and the counter electrode layer, and

wherein introducing the lithium further comprises forming a layer of lithium metal disposed between the electrochromic layer and the ion conducting layer, and/or the counter electrode layer and the ion conducting layer.

4. The method of claim 1, wherein the excess lithium is included in the electrochromic layer or in the counter electrode layer.

5. The method of claim 1, wherein the excess lithium is included in both the electrochromic layer and in the counter electrode layer.

6. The method of claim 1, wherein the excess lithium is between 10% and 500% of that required for the electrochromic device to operate in transitioning between optical states.

7. The method of claim 1, wherein the excess lithium is between 25% and 250% of that required for the electrochromic device to operate in transitioning between optical states.

8. The method of claim 1, wherein the excess lithium is between 50% and 100% of that required for the electrochromic device to operate in transitioning between optical states.

9. The method of claim 1, wherein lithium is introduced such that the electrochromic layer includes substantially no lithium, and the counter electrode layer includes lithium.

10. The method in claim 9, wherein the electrochromic layer is formed before the counter electrode layer is formed.

11. The method of claim 1,

further comprising forming a capping layer on the second transparent conducting oxide layer, and

wherein the capping layer is configured to reduce lithium diffusion from the electrochromic device during tempering.

12. The method of claim 11, wherein the capping layer includes at least one of lithium metal and a lithium intermetallic.

13. The method of claim 1,

wherein fabricating the electrochromic device includes forming the electrochromic layer and/or the counter electrode layer including a specific stoichiometry of oxygen and/or lithium, and

wherein tempering the glass substrate causes the oxygen and/or lithium in the electrochromic device to diffuse in the electrochromic device to form a functional electrochromic device configured to operate in transitioning between optical states.

29. The method of claim 11, wherein the capping layer is a sacrificial layer.

30. The method of claim 29, wherein the capping layer comprises at least one of silicon, titanium or aluminum.

31. The method of claim 30, further comprising removing the capping layer after tempering the glass substrate.

14. A method of fabricating an electrochromic device on a glass substrate, the method comprising:

a) forming a lithium diffusion barrier on the glass substrate;

b) forming a first transparent conducting oxide layer on the glass substrate;

c) forming a stack on the first transparent conducting oxide layer, comprising;

(i) forming an electrochromic layer comprising an electrochromic material, wherein the electrochromic layer is formed to include a superstoichiometric oxygenated region of the electrochromic material; and

(ii) forming a counter electrode layer comprising a counter electrode material;

d) forming a second transparent conducting oxide layer on top of the stack;

e) providing lithium ions in the electrochromic device;

f) driving the lithium ions in the electrochromic device into the electrochromic layer, the counter electrode layer, and/or a region between the electrochromic layer and the counter electrode layer; and

,

g) after driving the lithium ions, tempering the glass substrate.

15. The method of claim 14, wherein the lithium ions are driven into the counter electrode layer.

16. The method of claim 15, wherein 75% to 100% of the lithium ions are driven into the counter electrode layer.

17. The method of claim 14, wherein driving the lithium ions is performed after forming the electrochromic layer or the counter electrode layer.

18. The method of claim 14, wherein driving the lithium ions is performed after removing the glass substrate from an electrochromic device fabrication apparatus.

19. The method of claim 14, wherein driving the lithium ions is performed by heating the electrochromic layer or the counter electrode layer.

20. The method of claim 14, wherein driving the lithium ions is performed by applying voltage or current to the first and the second transparent conducting oxide layers.

21. A method comprising:

fabricating an electrochromic device disposed on a glass substrate;

providing a lithium source disposed on a surface of the electrochromic device; and

tempering the glass substrate after fabricating the electrochromic device on the glass substrate.

22. The method of claim 21, wherein lithium from the lithium source diffuses into the electrochromic device during tempering the glass substrate.

23. The method of claim 21, wherein the lithium source is provided on an exposed surface of the electrochromic device.

24. The method of claim 21, wherein the lithium source is provided between the glass substrate and the electrochromic device by depositing the lithium source on the glass substrate and then fabricating the electrochromic device on the lithium source.

25. The method of claim 21, wherein the lithium source is provided on edges of the electrochromic device.

26. The method of claim 21, wherein the lithium source includes metallic lithium and/or a lithium compound.

27. The method of claim 26, wherein the lithium compound includes at least one of lithium carbonate, lithium oxide, lithium silicate, lithium tungstate, and lithium niobate.

28. The method of claim 21, wherein the electrochromic device includes lithium apart from that supplied from the lithium source.