Mode-matched single proof-mass dual-axis gyroscope and method of fabrication
First Claim
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1. A single proof-mass, dual-axis gyroscope apparatus comprising:
- a resonating body member having a top surface and a side surface substantially perpendicular to the top surface; and
first and second electrodes capacitively coupled to the resonating body member, each electrode having a first portion disposed substantially parallel to the body member side surface and spaced therefrom by a respective lateral capacitive dielectric gap and a second portion disposed substantially parallel to the body member top surface and spaced therefrom by a respective vertical capacitive dielectric gap,wherein one of the lateral capacitive dielectric gap or the vertical capacitive dielectric gap of the first electrode is substantially smaller than the corresponding dielectric gap of the second electrode when the resonating body member is in a rest position.
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Abstract
A single proof-mass, dual-axis gyroscope apparatus comprises a resonating body member and first and second electrodes each capacitively coupled to the resonating body member by a respective lateral capacitive air gap and a vertical capacitive air gap. The width of one of the lateral capacitive air gap of the first electrode is substantially smaller than the vertical capacitive air gap. The width of one of the vertical capacitive air gap of the second electrode is substantially smaller than the lateral capacitive air gap. The apparatus claimed can address the process variation such as vertical and lateral dimension variation by electrostatic tuning method.
12 Citations
37 Claims
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1. A single proof-mass, dual-axis gyroscope apparatus comprising:
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a resonating body member having a top surface and a side surface substantially perpendicular to the top surface; and first and second electrodes capacitively coupled to the resonating body member, each electrode having a first portion disposed substantially parallel to the body member side surface and spaced therefrom by a respective lateral capacitive dielectric gap and a second portion disposed substantially parallel to the body member top surface and spaced therefrom by a respective vertical capacitive dielectric gap, wherein one of the lateral capacitive dielectric gap or the vertical capacitive dielectric gap of the first electrode is substantially smaller than the corresponding dielectric gap of the second electrode when the resonating body member is in a rest position. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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32. A single proof-mass dual-axis gyroscope apparatus comprising:
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a resonating body member; and a plurality of electrodes each capacitively coupled to, and spaced from, the resonating body member by a lateral capacitive dielectric gap and a vertical capacitive dielectric gap arranged substantially perpendicular to the lateral capacitive dielectric gap, wherein a width of at least one of the dielectric gaps capacitively coupling a first electrode of the plurality of electrodes to the resonating body member is substantially smaller than a corresponding dielectric gap capacitively coupling a second electrode of the plurality of electrodes to the resonating body member when the resonating body member is in a rest position. - View Dependent Claims (33, 34, 35)
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36. A method of fabricating a single proof-mass dual-axis gyroscope apparatus comprising:
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A) forming a resonating body member having a top surface and a side surface substantially perpendicular to the top surface; B) forming a side electrode separated from the side surface of the resonating body member by a first lateral capacitive dielectric gap substantially smaller than a first vertical capacitive dielectric gap separating the side electrode from the top surface of the resonating body member; C) forming a top electrode separated from the top surface of the resonating body member by a second vertical capacitive dielectric gap substantially smaller than a second lateral capacitive dielectric gap separating the top electrode from the side surface of the resonating body member; and D) forming the side and top electrodes such that the first lateral capacitive dielectric gap is substantially smaller than the second lateral capacitive dielectric gap when the resonating body member is in a rest position.
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37. A gyroscope apparatus comprising:
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a resonating body member having a top surface and a side surface substantially perpendicular to the top surface; a first electrode, capacitively coupled to the resonating body member, having a first portion disposed substantially parallel to the resonating body member side surface and spaced therefrom by a respective first lateral capacitive dielectric gap and a second portion disposed substantially parallel to the resonating body member top surface and spaced therefrom by a respective first vertical capacitive dielectric gap; and a second electrode, capacitively coupled to the resonating body member, having a first portion disposed substantially parallel to the resonating body member side surface and spaced therefrom by a respective second lateral capacitive dielectric gap and a second portion disposed substantially parallel to the resonating body member top surface and spaced therefrom by a respective second vertical capacitive dielectric gap, wherein one of the first lateral or vertical capacitive dielectric gaps of the first electrode is substantially smaller than the corresponding gap of the second electrode when the resonating body member is in a rest position.
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Specification