Method and apparatus for inspecting workpieces
First Claim
1. A method of measurement on measuring apparatus, comprising:
- providing a master artefact in the form of a reference workpiece which is one of a series of nominally identical workpieces to be measured, the master artefact having dimensions which are known from a source which is external to said measuring apparatus,measuring the master artefact on said apparatus at two or more temperatures, and producing two or more corresponding sets of measured dimensional values of the master artefact at the respective temperatures,measuring said temperatures at which the master artefact was measured,generating one or more error maps or look-up tables or functions which relate the measured dimensional values of the master artefact to the known dimensions of the master artefact, the or each error map, look-up table or function being dependent on said respective temperatures at which the master artefact was measured.
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Accused Products
Abstract
A series of nominally identical production workpieces is measured on a measuring apparatus. To correct for temperature variations, one of the workpieces forms a master artifact, the dimensions of which are known. The artifact is measured on the measuring apparatus at two or more temperatures, producing two or more corresponding sets of measured dimensional values of the master artifact at the respective temperatures. One or more error maps, look-up tables, or functions are generated which relate the measured dimensional values of the artifact to the known dimensions of the artifact. The error map(s), look-up table(s) or function(s) are dependent on the respective temperatures at which the artifact was measured. Correction values derived from the error map(s), look-up table(s) or function(s) are used to correct the measurements of production workpieces in the series. These correction values are determined in dependence upon the temperature at which the workpiece measurements were obtained.
29 Citations
25 Claims
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1. A method of measurement on measuring apparatus, comprising:
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providing a master artefact in the form of a reference workpiece which is one of a series of nominally identical workpieces to be measured, the master artefact having dimensions which are known from a source which is external to said measuring apparatus, measuring the master artefact on said apparatus at two or more temperatures, and producing two or more corresponding sets of measured dimensional values of the master artefact at the respective temperatures, measuring said temperatures at which the master artefact was measured, generating one or more error maps or look-up tables or functions which relate the measured dimensional values of the master artefact to the known dimensions of the master artefact, the or each error map, look-up table or function being dependent on said respective temperatures at which the master artefact was measured. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method of measurement on measuring apparatus, comprising:
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providing a master artefact in the form of a reference workpiece having dimensions which are known from a source which is external to said measuring apparatus, measuring the reference workpiece on said apparatus at a first temperature, and producing a resulting first set of measured dimensional values of the reference workpiece at the first temperature, generating at least one error map or look-up table or function which relates the measured dimensional values of the reference workpiece at the first temperature to the known dimensions of the reference workpiece, measuring a production workpiece on said apparatus to obtain measured workpiece dimensional values, and measuring the temperature at which the workpiece dimensional values were obtained, and correcting the workpiece dimensional values with correction values derived from the error map, look-up table or function, wherein the correction values are determined in dependence upon the temperature at which the workpiece dimensional values were obtained. - View Dependent Claims (18, 19, 20, 21, 22)
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23. A measuring apparatus comprising:
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a measuring device configured (i) to measure a master artefact on the apparatus at a first temperature and (ii) to produce a resulting first set of measured dimensional values of the master artefact at the first temperature, the master artefact being in the form of a reference workpiece having dimensions which are known from a source which is external to the apparatus; a temperature measuring device configured to measure the temperature at which the master artefact was measured; and a computer control configured to generate one or more error maps or look-up tables or functions which relate the measured dimensional values of the master artefact at the first temperature to the known dimensions of the master artefact, wherein the or each error map, look-up table or function is dependent on the temperature at which the master artefact was measured.
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24. A non-transitory computer-readable medium storing a software program for a measuring apparatus, the program being configured to cause the apparatus to perform the following:
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measuring a master artefact on said apparatus at a first temperature, and producing a resulting first set of measured dimensional values of the master artefact at the first temperature, wherein the master artefact is in the form of a reference workpiece having dimensions which are known from a source which is external to said measuring apparatus, generating one or more error maps or look-up tables or functions which relate the measured dimensional values of the master artefact at the first temperature to the known dimensions of the master artefact, and measuring the temperature at which the master artefact was measured, the or each error map, look-up table or function being dependent on said temperature at which the master artefact was measured.
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25. A method of calibration on measuring apparatus, comprising:
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measuring a master artefact on said apparatus at a first temperature, and producing a resulting first set of measured dimensional values of the master artefact at the first temperature, wherein the master artefact is in the form of a reference workpiece having dimensions which are known from a source which is external to said measuring apparatus, generating one or more error maps or look-up tables or functions which relate the measured dimensional values of the master artefact at the first temperature to the known dimensions of the master artefact, and measuring the temperature at which the master artefact was measured, the or each error map, look-up table or function being dependent on said temperature at which the master artefact was measured.
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Specification