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Method and apparatus for inspecting workpieces

  • US 9,739,606 B2
  • Filed: 08/09/2012
  • Issued: 08/22/2017
  • Est. Priority Date: 08/09/2011
  • Status: Active Grant
First Claim
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1. A method of measurement on measuring apparatus, comprising:

  • providing a master artefact in the form of a reference workpiece which is one of a series of nominally identical workpieces to be measured, the master artefact having dimensions which are known from a source which is external to said measuring apparatus,measuring the master artefact on said apparatus at two or more temperatures, and producing two or more corresponding sets of measured dimensional values of the master artefact at the respective temperatures,measuring said temperatures at which the master artefact was measured,generating one or more error maps or look-up tables or functions which relate the measured dimensional values of the master artefact to the known dimensions of the master artefact, the or each error map, look-up table or function being dependent on said respective temperatures at which the master artefact was measured.

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