Methods for perforating multi-layer graphene through ion bombardment

• US 9,744,617 B2
• Filed: 08/05/2015
• Issued: 08/29/2017
• Est. Priority Date: 01/31/2014
• Status: Expired due to Fees

• Current Assignee: Lockheed Martin Corporation (Martin Marietta Corporation)
• Original Assignee: Lockheed Martin Corporation (Martin Marietta Corporation)
• Inventors: Bedworth, Peter V., Swett, Jacob L.
• Primary Examiner(s): IPPOLITO, NICOLE MARIE
• Application Number:
  US14/819,273
• Publication Number:
  US 20150336202A1
• Time in Patent Office: 755 Days
• Field of Search: 2504921, 2504922, 2504923
• CPC Class Codes: B23K 15/0006 specially adapted for particular articles
• CPC Class Codes: B23K 15/06 within a vacuum chamber B23K15/04 takes precedence
• CPC Class Codes: B23K 15/085 Boring
• CPC Class Codes: B23K 2103/172 wherein at least one of the layers is non-metallic
• CPC Class Codes: B23K 2103/30 Organic material
• CPC Class Codes: C01B 32/194 After-treatment
• CPC Class Codes: H01J 37/31 for cutting or drilling methods for cutting or drilling metals with electron beams B23K15/00
• CPC Class Codes: H01J 37/317 for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation H01J37/36 takes precedence
• CPC Class Codes: Y10T 428/24322 Composite web or sheet

Abstract

Multi-layer sheets of graphene-based material having a plurality of pores extending therethrough are described herein. Methods for making the sheets include exposing a graphene-based material comprising multilayer graphene having from 5 to 20 layers of graphene to a particle beam having an ion energy of at least about 1500 eV to create damage tracks in the graphene sheets. The damage tracks in the graphene sheets are then exposed to a chemical etchant, such as an oxidant to define pores through the stacked graphene sheets. Production of the damage tracks and etching of the damage tracks can take place while the graphene is disposed on a substrate.

Claims

1. A method comprising:

providing a sheet of graphene-based material comprising multi-layer graphene having between about 10 and about 20 graphene layers;

exposing the sheet of graphene-based material comprising multi-layer graphene to a particle beam having an ion energy of at least about 1500 eV to produce a plurality of damage tracks in the multi-layer graphene, the damage tracks extending entirely through the basal planes of the multiple graphene sheets; and

exposing the sheet of graphene-based material comprising multi-layer graphene to a chemical etchant to remove carbon atoms from the graphene at the damage tracks and open a plurality of pores extending through the multiple graphene sheets.

2. The method of claim 1, wherein the chemical etchant is an oxidant.

3. The method of claim 2, wherein the oxidant is selected from the group consisting of ozone, an aqueous solution of potassium permanganate, an aqueous solution of potassium permanganate and sulfuric acid, an aqueous solution of potassium permanganate and potassium hydroxide and a solution of hydrogen peroxide and sulfuric acid.

4. The method of claim 1, wherein the ion energy is greater than 1.5 keV and less than 100 keV.

5. The method of claim 1, wherein the ion energy is greater than 1.5 keV and less than 10 keV.

6. The method of claim 1, wherein the particle beam comprises ions selected from the group consisting of Xe⁺ ions, Ne⁺ ions and Ar⁺ ions.

7. The method of claim 1, wherein the particle beam comprises xenon ions.

8. The method of claim 1, wherein the particle beam comprises ions selected from the group consisting of tropyllium ions and ferrocenium ions.

9. The method of claim 1, wherein the graphene is disposed on a substrate when producing the damage tracks.

10. The method of claim 9, wherein the substrate is a metal growth substrate.

11. A sheet of graphene-based material comprising multi-layer graphene having from 10 to 20 graphene layers and comprising a plurality of pores extending therethrough.

12. The sheet of graphene-based material of claim 11, wherein the size of the pores is less than or equal to 50 nm.

13. The sheet of graphene-based material of claim 11, wherein the pores range from 0.2 nm to 50 nm in size.

14. The sheet of graphene-based material of claim 11, wherein the pores range from 0.3 nm to 50 nm in size.

15. The sheet of graphene-based material of claim 11, wherein the sheet of graphene-based material is prepared by

providing a sheet of graphene-based material comprising multi-layer graphene having between about 10 and about 20 graphene layers;

exposing the sheet of graphene-based material comprising multi-layer graphene to a particle beam having an ion energy of at least about 1500 eV to produce a plurality of damage tracks in the multi-layer graphene, the damage tracks extending entirely through the basal planes of the multiple graphene sheets; and

exposing the sheet of graphene-based material comprising multi-layer graphene to a chemical etchant to remove carbon atoms from the graphene at the damage tracks and open a plurality of pores extending through the multiple graphene sheets.

16. The sheet of graphene-based material of claim 11, wherein the sheet of graphene-based material is prepared by

providing a sheet of graphene-based material comprising multi-layer graphene having between about 10 and about 20 graphene layers;

exposing the sheet of graphene-based material comprising multi-layer graphene to a particle beam having an ion energy of at least about 1500 eV to produce a plurality of damage tracks in the multi-layer graphene, the damage tracks extending entirely through the basal planes of the multiple graphene sheets; and

exposing the sheet of graphene-based material comprising multi-layer graphene to a chemical etchant to remove carbon atoms from the graphene at the damage tracks and open a plurality of pores extending through the multiple graphene sheets,

wherein the graphene is disposed on a substrate when producing the damage tracks.