Acoustic resonator comprising integrated structures for improved performance
First Claim
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1. An acoustic resonator structure comprising:
- a first electrode disposed on a substrate;
a piezoelectric layer disposed on the first electrode;
a second electrode disposed on the piezoelectric layer;
a frame disposed within a main membrane region defined by an overlap between the first electrode, the piezoelectric layer, and the second electrode, and having an outer edge substantially aligned with a boundary of the main membrane region;
a collar formed separate from the frame, disposed outside the main membrane region, and having an inner edge substantially aligned with the boundary of or overlapping the main membrane region;
a temperature compensation feature having a positive temperature coefficient for offsetting at least a portion of a negative temperature coefficient of the piezoelectric layer, the first electrode, and the second electrode; and
a planarization layer disposed on the piezoelectric layer adjacent to the second electrode, wherein the collar is disposed on the planarization layer and the second electrode.
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Abstract
An acoustic resonator structure comprises a first electrode disposed on a substrate, a piezoelectric layer disposed on the first electrode, a second electrode disposed on the piezoelectric layer, and an air cavity disposed in the substrate below at least a portion of a main membrane region defined by an overlap between the first electrode. The acoustic resonator structure may further comprise various integrated structures at or around the main membrane region to improve its electrical performance.
58 Citations
19 Claims
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1. An acoustic resonator structure comprising:
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a first electrode disposed on a substrate; a piezoelectric layer disposed on the first electrode; a second electrode disposed on the piezoelectric layer; a frame disposed within a main membrane region defined by an overlap between the first electrode, the piezoelectric layer, and the second electrode, and having an outer edge substantially aligned with a boundary of the main membrane region; a collar formed separate from the frame, disposed outside the main membrane region, and having an inner edge substantially aligned with the boundary of or overlapping the main membrane region; a temperature compensation feature having a positive temperature coefficient for offsetting at least a portion of a negative temperature coefficient of the piezoelectric layer, the first electrode, and the second electrode; and a planarization layer disposed on the piezoelectric layer adjacent to the second electrode, wherein the collar is disposed on the planarization layer and the second electrode. - View Dependent Claims (2, 3, 4, 5, 6)
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7. An acoustic resonator structure comprising:
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a first electrode disposed on a substrate; a piezoelectric layer disposed on the first electrode; a second electrode disposed on the piezoelectric layer; a frame disposed within a main membrane region defined by an overlap between the first electrode, the piezoelectric layer, and the second electrode, and having an outer edge substantially aligned with a boundary of the main membrane region; a collar formed separate from the frame, disposed outside the main membrane region, and having an inner edge substantially aligned with the boundary of or overlapping the main membrane region; and a temperature compensation feature having a positive temperature coefficient for offsetting at least a portion of a negative temperature coefficient of the piezoelectric layer, the first electrode, and the second electrode, wherein the frame is disposed at a bottom portion of the second electrode. - View Dependent Claims (8, 9, 10, 11, 12, 13)
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14. An acoustic resonator structure comprising:
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a first electrode disposed on a substrate; a piezoelectric layer disposed on the first electrode; a second electrode disposed on the piezoelectric layer; a frame disposed within a main membrane region defined by an overlap between the first electrode, the piezoelectric layer, and the second electrode, and having an outer edge substantially aligned with a boundary of the main membrane region; a collar formed separate from the frame, disposed outside the main membrane region, and having an inner edge substantially aligned with the boundary of or overlapping the main membrane region; and a temperature compensation feature having a positive temperature coefficient for offsetting at least a portion of a negative temperature coefficient of the piezoelectric layer, the first electrode, and the second electrode, wherein the frame is disposed at a bottom portion of the first electrode. - View Dependent Claims (15, 16, 17, 18, 19)
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Specification