Chemical vapor deposition process for depositing zinc oxide coatings, method for forming a conductive glass article and the coated glass articles produced thereby

• US 9,776,914 B2
• Filed: 03/08/2013
• Issued: 10/03/2017
• Est. Priority Date: 03/16/2012
• Status: Active Grant

• Current Assignee: Pilkington Group Limited
• Original Assignee: Pilkington Group Limited
• Inventors: Wang, Yu, Varanasi, Srikanth, Strickler, David Alan
• Primary Examiner(s): Gambetta, Kelly M
• Application Number:
  US13/261,951
• Publication Number:
  US 20150017431A1
• Time in Patent Office: 1,670 Days
• CPC Class Codes: C03C 17/245 by deposition from the vapour phase
• CPC Class Codes: C03C 17/3417 all coatings being oxide coatings
• CPC Class Codes: C03C 2217/94 Transparent conductive oxide layers [TCO] being part of a multilayer coating
• CPC Class Codes: C03C 2218/1525 by atmospheric CVD
• CPC Class Codes: C23C 16/407 of zinc, germanium, cadmium, indium, tin, thallium or bismuth
• CPC Class Codes: C23C 16/45595 Atmospheric CVD gas inlets with no enclosed reaction chamber
• CPC Class Codes: C23C 16/545 for coating elongated substrates
• CPC Class Codes: Y10T 428/265 1 mil or less

Abstract

A CVD process for depositing a zinc oxide coating is provided. The CVD process includes providing a moving glass substrate. The CVD process also includes forming a gaseous mixture of an alkyl zinc compound and an inert gas as a first stream, providing a first gaseous inorganic oxygen-containing compound in a second stream and providing a second gaseous inorganic oxygen-containing compound in the second stream, a third stream or in both the second and third streams. Additionally, the CVD process includes mixing the streams at or near a surface of the moving glass substrate and a zinc oxide coating is formed thereon. A method for forming a coated glass article is also provided. Additionally, a coated glass article is provided.

Claims

1. A chemical vapor deposition process for depositing a zinc oxide coating, comprising:

providing a moving glass substrate;

forming a gaseous mixture comprised of an alkyl zinc compound and an inert gas as a first stream;

providing a first gaseous inorganic oxygen-containing compound in a second stream;

providing a second gaseous inorganic oxygen-containing compound in the second stream, in a third stream, or in both the second and third streams;

providing acetyl acetone in the first stream, second stream, third stream or another stream; and

mixing the gaseous streams at or near a surface of the moving glass substrate to form a zinc oxide coating thereon.

2. The process defined in claim 1, wherein the streams are directed through a coating apparatus prior to forming the zinc oxide coating.

3. The process defined in claim 1, wherein the first inorganic oxygen-containing compound is water and the second inorganic oxygen-containing compound is oxygen.

4. The process defined in claim 1, wherein the zinc oxide coating is a pyrolytic coating.

5. The process defined in claim 1, wherein the zinc oxide coating is formed on a glass ribbon in a float glass manufacturing process at essentially atmospheric pressure.

6. The process defined in claim 1, wherein a fluorine doped tin oxide coating is deposited over the surface of the glass substrate prior to forming the zinc oxide coating.

7. The process defined in claim 2, wherein the gaseous streams are separately directed through a coating apparatus prior to being mixed.

8. The process defined in claim 2, further comprising discharging the gaseous streams from the coating apparatus at the predetermined distance above the glass substrate.

9. The process defined in claim 1, wherein the alkyl zinc compound is dimethyl zinc and the first and second inorganic oxygen-containing compounds are water and oxygen.

10. The process defined in claim 6, wherein a tin oxide coating is deposited over the fluorine doped tin oxide coating prior to forming the zinc oxide coating.