Target material thickness measuring apparatus

  • US 9,778,024 B2
  • Filed: 07/28/2015
  • Issued: 10/03/2017
  • Est. Priority Date: 02/05/2015
  • Status: Active Grant
First Claim
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1. A target material thickness measuring apparatus, comprising:

  • a support; and

    a plurality of distance measuring units (13) mounted on the support and arranged in a first direction, the plurality of distance measuring units (13) being configured to measure respectively thicknesses of portions of a target material at a plurality of positions in the first direction,wherein each of the distance measuring units (13) comprises;

    a test probe (15) which is movable in a second direction perpendicular to the first direction and also perpendicular to a surface of the target material, the test probe (15) having a first end configured to contact the surface of the target material and an opposite second end; and

    a helical spring (16) fitted over the test probe (15) and adapted for exerting a force on the test probe (15) towards the surface of the target material in the second direction, and the helical springs (16) provided on the adjacent test probes (15) are arranged in a staggered way in the second direction.

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