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Applying RF energy according to time variations in EM feedback

  • US 9,804,104 B2
  • Filed: 03/14/2013
  • Issued: 10/31/2017
  • Est. Priority Date: 03/19/2012
  • Status: Active Grant
First Claim
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1. A method of processing an object in a cavity by applying radio frequency (RF) energy to the cavity, the method comprising applying RF energy to the cavity at a plurality of frequencies, andfor each frequency:

  • receiving a value indicative of a dielectric response of the cavity to RF energy applied;

    identifying a change over time in the value indicative of the dielectric response of the cavity to RF energy; and

    adjusting the RF energy application based on the identified change,wherein adjusting the RF energy application based on the identified change comprises applying more energy at a first plurality of frequencies than at a second plurality of frequencies, wherein the change over time identified for the first plurality of frequencies is higher than a first threshold and the change over time identified for the second plurality of frequencies is lower than the first threshold.

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