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Multilayered polyimide film having a low dielectric constant, laminate structure including the same and manufacture thereof

  • US 9,850,401 B2
  • Filed: 12/04/2014
  • Issued: 12/26/2017
  • Est. Priority Date: 12/05/2013
  • Status: Active Grant
First Claim
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1. A multilayered polyimide film comprising:

  • a first polyimide layer incorporating fluorine-containing polymer particles, and having a first surface and a second surface; and

    a second polyimide layer and a third polyimide layer respectively disposed on the first surface and the second surface, the second and the third polyimide layers respectively containing organic silicon oxygen compound particles;

    wherein the multilayered polyimide film has a coefficient of thermal expansion (CTE) between about 13 and about 30 ppm/°

    C.

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