Lithographic apparatus and device manufacturing method
First Claim
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1. A method comprising:
- supporting a substrate on a substrate table;
providing a liquid in a region between a projection system and the substrate;
projecting, using the projection system, a modulated radiation beam through the liquid and onto a substrate; and
removably supporting a single cover plate having an opening wider than the substrate on the substrate table, during the projecting, using a two-dimensional array of protrusions, the cover plate providing a surface facing the projection system that is adjacent the substrate.
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Abstract
A lithographic apparatus with a cover plate formed separately from a substrate table and means for stabilizing a temperature of the substrate table by controlling the temperature of the cover plate is disclosed. A lithographic apparatus with thermal insulation provided between a cover plate and a substrate table so that the cover plate acts as a thermal shield for the substrate table is disclosed. A lithographic apparatus comprising means to determine a substrate table distortion and improve position control of a substrate by reference to the substrate table distortion is disclosed.
239 Citations
21 Claims
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1. A method comprising:
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supporting a substrate on a substrate table; providing a liquid in a region between a projection system and the substrate; projecting, using the projection system, a modulated radiation beam through the liquid and onto a substrate; and removably supporting a single cover plate having an opening wider than the substrate on the substrate table, during the projecting, using a two-dimensional array of protrusions, the cover plate providing a surface facing the projection system that is adjacent the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method comprising:
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supporting a substrate on a substrate table; providing a liquid in a region between a projection system and the substrate; projecting, using the projection system, a modulated radiation beam through the liquid and onto a substrate; and removably supporting a plurality of cover plates on the substrate table using a two-dimensional array of protrusions between the cover plates and the substrate table, wherein the cover plates are located around the substrate during the projecting to provide a surface facing the projection system. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A method comprising:
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supporting a substrate on a substrate table; providing a liquid in a region between a projection system and the substrate; projecting, using the projection system, a modulated radiation beam through the liquid and onto a substrate; and supporting a cover plate on the substrate table using a two-dimensional array of protrusions extending under the cover plate and under the substrate, wherein the cover plate is located to the side of the substrate during the projecting and the tops of the plurality of protrusions under the cover plate and the substrate are arranged in a substantially flat plane. - View Dependent Claims (17, 18, 19, 20, 21)
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Specification