Lattice-mismatched semiconductor structures with reduced dislocation defect densities and related methods for device fabrication

• US 9,859,381 B2
• Filed: 09/03/2015
• Issued: 01/02/2018
• Est. Priority Date: 05/17/2005
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Li, Jizhong, Lochtefeld, Anthony J.
• Primary Examiner(s): Slutsker, Julia
• Application Number:
  US14/844,332
• Publication Number:
  US 20160064492A1
• Time in Patent Office: 852 Days
• CPC Class Codes: H01L 21/02381 Silicon, silicon germanium, germanium
• CPC Class Codes: H01L 21/02433 Crystal orientation
• CPC Class Codes: H01L 21/02521 Materials
• CPC Class Codes: H01L 21/02609 Crystal orientation
• CPC Class Codes: H01L 21/02639 Preparation of substrate for selective deposition
• CPC Class Codes: H01L 21/02647 Lateral overgrowth
• CPC Class Codes: H01L 21/7624 using semiconductor on insulator [SOI] technology H01L21/76297 takes precedence; manufacture of integrated circuits on insulating substrates H01L21/84; silicon on sapphire [SOS] technology H01L21/86
• CPC Class Codes: H01L 21/823807 with a particular manufacturing method of the channel structures, e.g. channel implants, halo or pocket implants, or channel materials
• CPC Class Codes: H01L 21/8252 the substrate being a semiconductor, using III-V technology H01L21/8258 takes precedence
• CPC Class Codes: H01L 21/8258 the substrate being a semiconductor, using a combination of technologies covered by H01L21/8206, H01L21/8213 , H01L21/822, H01L21/8252, H01L21/8254 or H01L21/8256
• CPC Class Codes: H01L 27/0605 integrated circuits made of compound material, e.g. AIIIBV
• CPC Class Codes: H01L 29/045 by their particular orientation of crystalline planes
• CPC Class Codes: H01L 29/1054 with a variation of the composition, e.g. channel with strained layer for increasing the mobility
• CPC Class Codes: H01L 29/205 in different semiconductor regions , e.g. heterojunctions
• CPC Class Codes: H01L 29/66795 with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
• CPC Class Codes: H01L 29/7827 Vertical transistors H01L29/7802, H01L29/78642 take precedence
• CPC Class Codes: H01L 29/785 having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
• CPC Class Codes: H01L 31/036 characterised by their crystalline structure or particular orientation of the crystalline planes
• CPC Class Codes: H01L 31/0735 comprising only AIIIBV compound semiconductors, e.g. GaAs/AlGaAs or InP/GaInAs solar cells
• CPC Class Codes: H01L 33/0025 comprising only AIIIBV compounds
• CPC Class Codes: H01L 33/18 : within the light emitting region
• CPC Class Codes: H01S 5/22 : having a ridge or stripe structure
• CPC Class Codes: H01S 5/323 : in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
• CPC Class Codes: Y02E 10/544 : Solar cells from Group III-V materials

Abstract

A method of forming a semiconductor structure includes forming an opening in a dielectric layer, forming a recess in an exposed part of a substrate, and forming a lattice-mismatched crystalline semiconductor material in the recess and opening.

Claims

1. A semiconductor structure comprising:

a substrate comprising a first crystalline semiconductor material having a top surface with a first crystal orientation, the substrate including a recess from the top surface into the substrate with a maximum depth d, wherein all of the recessed surfaces of the recess have a second crystal orientation different from the first crystal orientation;

a dielectric sidewall of height h disposed on the top surface of the substrate and proximate the recess; and

a second crystalline semiconductor material of a maximum width w disposed in the recess, the recess defining an interface between the second crystalline semiconductor material and the substrate, wherein the second crystalline material physically contacts all of the recessed surfaces of the recess,

wherein the second crystalline semiconductor material has a lattice mismatch with the first crystalline semiconductor material, the lattice mismatch causes defects in the second crystalline semiconductor material, and the defects terminate at a distance H above a bottom surface of the recess.

2. The semiconductor structure of claim 1, wherein H is less than h+d.

3. The semiconductor structure of claim 2, wherein H is less than d.

4. The semiconductor structure of claim 1, wherein H is less than or equal to w.

5. The semiconductor structure of claim 1, wherein a ratio of h+d to w is greater than or equal to one.

6. The semiconductor structure of claim 1, wherein the recess has a v-shaped profile.

7. The semiconductor structure of claim 1, wherein the first crystal orientation is (100), and the second crystal orientation is not (100).

8. The semiconductor structure of claim 7, wherein the second crystal orientation is (111).

9. The semiconductor structure of claim 1, further comprising a third crystalline semiconductor material disposed above the second crystalline semiconductor material.

10. The semiconductor structure of claim 9, wherein the third crystalline semiconductor material is lattice mismatched to the second crystalline semiconductor material, and the lattice mismatch between the second crystalline semiconductor material and the first crystalline semiconductor material is less than a lattice mismatch between the third crystalline semiconductor material and the first crystalline semiconductor material.

11. The semiconductor structure of claim 9, wherein a boundary defined by the interface between the second crystalline semiconductor material and the third crystalline semiconductor material is proximate a boundary defined by an interface between the substrate and the dielectric sidewall.

12. The semiconductor structure of claim 1, further comprising a photonic structure disposed at least partially above the second crystalline semiconductor material.

13. The semiconductor structure of claim 1, further comprising a photonic structure disposed at least partially inside the recess.

14. The semiconductor structure of claim 1, further comprising a third crystalline semiconductor material disposed over the second crystalline semiconductor material, wherein a bandgap of the third crystalline semiconductor material is lower than a bandgap of the second crystalline semiconductor material.

15. The semiconductor structure of claim 1, further comprising a third crystalline semiconductor material disposed over the second crystalline semiconductor material, wherein the second crystalline semiconductor material is n-doped and the third crystalline semiconductor material is p-doped.

16. The semiconductor structure of claim 1, further comprising a third crystalline semiconductor material disposed over the second crystalline semiconductor material, wherein the second crystalline semiconductor material is GaAs and the third crystalline semiconductor material is lnP.

17. A semiconductor structure comprising:

a first substrate comprising a first crystalline semiconductor material having a top surface and a bottom surface opposite from the top surface, the first substrate including a recess extending from the top surface into the first substrate, wherein a side surface of the recess has a different crystal orientation than the top surface of the first substrate;

a dielectric layer on the top surface of the first substrate, an opening extending through the dielectric layer to the recess, wherein a height of the dielectric layer above the top surface of the first substrate is greater than the depth the recess extends from the top surface into the first substrate; and

a second crystalline semiconductor material in the recess and the opening, the second crystalline semiconductor material being lattice mismatched to the first crystalline semiconductor material, the lattice mismatch causing defects in the second crystalline semiconductor material, the defects terminating in at least one of the recess or the opening;

a photonic device on the second crystalline semiconductor material;

a second substrate bonded to the photonic device;

a first metal contact layer on the second substrate; and

a second metal contact layer on the bottom surface of the first substrate.

18. The semiconductor structure of claim 17, wherein the recess of the first substrate has a maximum depth d, the dielectric layer has a height h, the second crystalline semiconductor material has a maximum width w disposed in the recess, the defects terminate at a distance H above a bottom surface of the recess.

19. The semiconductor structure of claim 18, wherein H is less than d.

20. A semiconductor structure comprising:

a substrate comprising a first crystalline semiconductor material having a top surface with a first crystal orientation, the substrate including a v-shaped recess from the top surface into the substrate, the v-shaped recess comprising a recessed surface with a second crystal orientation;

a dielectric sidewall disposed on the top surface of the substrate and proximate the recess, the dielectric sidewall defining an opening over the v-shaped recess, the dielectric sidewall comprising a dielectric material, wherein the v-shaped recess is free of the dielectric material;

a second crystalline semiconductor material disposed in the recess, the recess defining an interface between the second crystalline semiconductor material and the substrate, the second crystalline semiconductor material having a lattice mismatch with the first crystalline semiconductor material, the lattice mismatch causes defects in the second crystalline semiconductor material, and the defects terminate within at least one of the v-shaped recess or the opening; and

a third crystalline semiconductor material disposed above the second crystalline semiconductor material, the third crystalline semiconductor material being lattice mismatched to the second crystalline semiconductor material, and the lattice mismatch between the second crystalline semiconductor material and the first crystalline semiconductor material is less than a lattice mismatch between the third crystalline semiconductor material and the first crystalline semiconductor material.