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Resonant type high frequency power supply device

  • US 9,871,416 B2
  • Filed: 10/31/2013
  • Issued: 01/16/2018
  • Est. Priority Date: 10/31/2013
  • Status: Active Grant
First Claim
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1. A high frequency power supply device, comprising:

  • a power element that performs a switching operation to generate a high frequency output voltage exceeding 2 MHz;

    a high frequency pulse drive circuit that drives said power element by applying a pulse-shaped driving voltage to said power element;

    a variable pulse signal generating circuit that provides a pulse-shaped voltage signal for said high frequency pulse drive circuit to generate said pulse-shaped driving voltage;

    a bias power supply circuit that supplies driving power to said variable pulse signal generating circuit and said high frequency pulse drive circuit; and

    a variable inductor to adjust an amplitude of a device output voltage, said variable inductor including a coil having a length, the variable inductor adjusting by changing the length of said coil.

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