Resonant type high frequency power supply device
First Claim
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1. A high frequency power supply device, comprising:
- a power element that performs a switching operation to generate a high frequency output voltage exceeding 2 MHz;
a high frequency pulse drive circuit that drives said power element by applying a pulse-shaped driving voltage to said power element;
a variable pulse signal generating circuit that provides a pulse-shaped voltage signal for said high frequency pulse drive circuit to generate said pulse-shaped driving voltage;
a bias power supply circuit that supplies driving power to said variable pulse signal generating circuit and said high frequency pulse drive circuit; and
a variable inductor to adjust an amplitude of a device output voltage, said variable inductor including a coil having a length, the variable inductor adjusting by changing the length of said coil.
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Abstract
A resonant type high frequency power supply device provided with a power semiconductor element that performs a switching operation at a high frequency exceeding 2 MHz, the resonant type high frequency power supply device including a variable inductor that makes an adjustment to the amplitude of a device output voltage.
8 Citations
5 Claims
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1. A high frequency power supply device, comprising:
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a power element that performs a switching operation to generate a high frequency output voltage exceeding 2 MHz; a high frequency pulse drive circuit that drives said power element by applying a pulse-shaped driving voltage to said power element; a variable pulse signal generating circuit that provides a pulse-shaped voltage signal for said high frequency pulse drive circuit to generate said pulse-shaped driving voltage; a bias power supply circuit that supplies driving power to said variable pulse signal generating circuit and said high frequency pulse drive circuit; and a variable inductor to adjust an amplitude of a device output voltage, said variable inductor including a coil having a length, the variable inductor adjusting by changing the length of said coil. - View Dependent Claims (2, 3, 4, 5)
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Specification