Nano sensor

  • US 9,927,391 B2
  • Filed: 08/23/2016
  • Issued: 03/27/2018
  • Est. Priority Date: 04/06/2004
  • Status: Active Grant
First Claim
Patent Images

1. A device, comprising:

  • an upper layer,a lower layer, anda nano sensor array are vertically aligned, and the nano sensor array positioned between the upper and lower layers to detect a presence of a liquid, gas, chemical, or biological object, wherein the nano sensor array'"'"'s electrical characteristic changes when encountering the liquid and wherein a physical parameter of the nano sensor array changes to measure a quantity or a presence of the liquid, gas, chemical, or biological object concentration.

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