Microwave plasma apparatus and method for materials processing
First Claim
1. A microwave plasma apparatus for processing a material, comprising:
- a plasma chamber;
a microwave radiation source for generating microwave radiation;
a waveguide guiding the microwave radiation from the microwave radiation source to the plasma chamber, the waveguide including a shell defining a longitudinal axis;
a gas supply in fluid communication with the plasma chamber for providing a gas to the plasma chamber; and
a material feeding system in communication with the plasma chamber for introducing a process material to the plasma chamber, the material feeding system comprising;
an emitter wire formed at least in part from the process material and protruding into the plasma chamber;
a gas injector that imparts to the gas a velocity into the chamber and substantially along a surface of the emitter wire; and
means for advancing the emitter wire into the plasma chamber;
wherein the microwave radiation couples to the gas to form a plasma;
wherein the gas injector and emitter wire are positioned relative to each other such that the gas and the emitter wire are in direct fluid contact upstream of the plasma;
wherein the emitter wire is advanced into the chamber in a direction perpendicular to the longitudinal axis defined by the shell such that the plasma comes into contact with the advancing emitter wire and erodes a portion of the advancing emitter wire; and
wherein the process material, through contact with the plasma, forms a product material.
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Accused Products
Abstract
A microwave plasma apparatus for processing a material includes a plasma chamber, a microwave radiation source, and a waveguide guiding microwave radiation from the microwave radiation source to the plasma chamber. A process gas flows through the plasma chamber and the microwave radiation couples to the process gas to produce a plasma jet. A process material is introduced to the plasma chamber, becomes entrained in the plasma jet, and is thereby transformed to a stream of product material droplets or particles. The product material droplets or particles are substantially more uniform in size, velocity, temperature, and melt state than are droplets or particles produced by prior devices.
19 Citations
17 Claims
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1. A microwave plasma apparatus for processing a material, comprising:
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a plasma chamber; a microwave radiation source for generating microwave radiation; a waveguide guiding the microwave radiation from the microwave radiation source to the plasma chamber, the waveguide including a shell defining a longitudinal axis; a gas supply in fluid communication with the plasma chamber for providing a gas to the plasma chamber; and a material feeding system in communication with the plasma chamber for introducing a process material to the plasma chamber, the material feeding system comprising; an emitter wire formed at least in part from the process material and protruding into the plasma chamber; a gas injector that imparts to the gas a velocity into the chamber and substantially along a surface of the emitter wire; and means for advancing the emitter wire into the plasma chamber; wherein the microwave radiation couples to the gas to form a plasma; wherein the gas injector and emitter wire are positioned relative to each other such that the gas and the emitter wire are in direct fluid contact upstream of the plasma; wherein the emitter wire is advanced into the chamber in a direction perpendicular to the longitudinal axis defined by the shell such that the plasma comes into contact with the advancing emitter wire and erodes a portion of the advancing emitter wire; and wherein the process material, through contact with the plasma, forms a product material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for processing a material in a plasma chamber, comprising the steps of:
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providing microwave radiation and a gas in a plasma chamber such that the microwave radiation couples to the gas to generate a plasma having a substantially laminar flow along an axis; and introducing a process material into the substantially laminar flow of the plasma in a direction substantially parallel to the axis of the substantially laminar flow; wherein the process material, through contact with the plasma, forms a product material; and wherein the step of introducing the process material includes advancing into the plasma chamber an emitter wire formed at least in part from the process material and in direct fluid contact with the gas such that the plasma comes into contact with the advancing emitter wire and erodes a portion of the advancing emitter wire. - View Dependent Claims (12, 13, 14, 15, 16, 17)
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Specification