Packaged semiconductor device having patterned conductance dual-material nanoparticle adhesion layer

• US 9,941,194 B1
• Filed: 02/21/2017
• Issued: 04/10/2018
• Est. Priority Date: 02/21/2017
• Status: Active Grant

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Cook, Benjamin Stassen, Lin, Daniel Yong
• Primary Examiner(s): Patel, Reema
• Assistant Examiner(s): GHEYAS, SYED I
• Application Number:
  US15/437,580
• Time in Patent Office: 413 Days
• CPC Class Codes: H01L 21/4825 Connection or disconnection of other leads to or from flat leads, e.g. wires, bumps, other flat leads
• CPC Class Codes: H01L 21/4857 Multilayer substrates multilayer metallisation on monolayer substrate H01L21/4846
• CPC Class Codes: H01L 21/4867 Applying pastes or inks, e.g. screen printing H01L21/486 takes precedence
• CPC Class Codes: H01L 21/56 Encapsulations, e.g. encapsulation layers, coatings
• CPC Class Codes: H01L 21/67121 Apparatus for making assemblies not otherwise provided for, e.g. package constructions
• CPC Class Codes: H01L 21/6715 Apparatus for applying a liquid, a resin, an ink or the like H01L21/67126 takes precedence
• CPC Class Codes: H01L 2224/16245 the item being metallic
• CPC Class Codes: H01L 2224/32225 the item being non-metallic, e.g. insulating substrate with or without metallisation
• CPC Class Codes: H01L 2224/32245 the item being metallic
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/48245 the item being metallic
• CPC Class Codes: H01L 2224/48247 connecting the wire to a bond pad of the item
• CPC Class Codes: H01L 2224/48465 the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
• CPC Class Codes: H01L 2224/73265 Layer and wire connectors
• CPC Class Codes: H01L 23/293 Organic, e.g. plastic
• CPC Class Codes: H01L 23/49517 Additional leads
• CPC Class Codes: H01L 23/49558 Insulating layers on lead frames, e.g. bridging members
• CPC Class Codes: H01L 23/49582 Metallic layers on lead frames
• CPC Class Codes: H01L 23/49586 Insulating layers on lead frames
• CPC Class Codes: H01L 24/16 of an individual bump connector
• CPC Class Codes: H01L 24/48 : of an individual wire connector
• CPC Class Codes: H01L 2924/00 : Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/00014 : the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/183 : Connection portion, e.g. seal
• CPC Class Codes: H01L 2924/186 : Material

Abstract

In an embodiment, a substrate made of a first material and having a surface is provided. A first and second nozzle dispense a first solvent paste including electrically conductive nanoparticles and a second solvent paste including non-conductive nanoparticles respectively while moving over the surface of the substrate. The first and second nozzles additively deposit a uniform layer comprising sequential and contiguous zones alternating between the first solvent paste and the second solvent paste. Energy is applied to the nanoparticles to sinter together the nanoparticles and diffuse the nanoparticles into the substrate. The sintered nanoparticles form a layer composed of an alternating sequence of electrically conductive zones contiguous with electrically non-conductive zones.

Claims

1. A method for substrate modification comprising:

providing a substrate of a first material, the substrate having a first surface;

providing a first nozzle and a second nozzle, the first nozzle dispensing a first solvent paste including electrically conductive nanoparticles of a second material, and the second nozzle dispensing a second solvent paste including electrically non-conductive nanoparticles of a third material;

moving the nozzles across the first surface for additively depositing a layer comprising sequential and contiguous zones alternatingly composed of the first solvent paste and the second solvent paste, the layer having uniform thickness;

applying energy to increase the temperature for sintering together the nanoparticles of the second material and the nanoparticles of the third material, and for concurrently diffusing second material and third material into the substrate adjoining the first surface;

wherein the sintered nanoparticles form a layer composed of an alternating sequence of electrically conductive zones contiguous with electrically non-conductive zones.

2. The method of claim 1 wherein the substrate of the first material is selected from a group including laminated substrate and metallic leadframe.

3. The method of claim 1 wherein the second material is selected from a group including metal nanoparticles, metal-coated polymeric nanoparticles, metal-coated ceramic nanoparticles, and metal-coated plastic nanoparticles.

4. The device of claim 1 wherein the third material is selected from a group including metal oxides nanoparticles, polymeric compound nanoparticles, nitrogen compound nanoparticles, and electrically conducting nanoparticles coated with polymerics, oxides, and carbon compounds.

5. The method of claim 1 wherein the process of additively depositing is selected from a group including screen printing, flexographic printing, gravure printing, dip coating, spray coating, and inkjet printing comprising piezoelectric, thermal, acoustic, and electrostatic inkjet printing.

6. The method of claim 1 wherein the energy for sintering the second nanoparticles is selected from a group including thermal energy, photonic energy, electromagnetic energy, and chemical energy.

7. A method for enhancing adhesion of packaged semiconductor devices, comprising:

providing a substrate of a first material, the substrate having a first surface;

providing a first nozzle and a second nozzle, the first nozzle dispensing a first solvent paste including electrically conductive nanoparticles of a second material, and the second nozzle dispensing a second solvent paste including electrically non-conductive nanoparticles of a third material;

moving the nozzles across the first surface for additively depositing a layer comprising sequential and contiguous zones alternatingly composed of the first solvent paste and the second solvent paste, the layer having uniform thickness;

applying energy to increase the temperature for sintering together the nanoparticles of the second material and the nanoparticles of the third material, and for concurrently diffusing second material and third material into the substrate region adjoining the first surface;

wherein the sintered nanoparticles form a layer composed of an alternating sequence of electrically conductive zones contiguous with electrically non-conductive zones; and

encapsulating the sintered nanoparticle layer and at least portions of the substrate into a package of a fourth material, the fourth material adhering to at least portions of the sintered nanoparticle layer.

8. The method of claim 7 wherein the substrate of the first material is selected from a group including laminated substrate and metallic leadframe.

9. The method of claim 8 wherein the substrate is a metallic leadframe for use in semiconductor devices with the first material selected from a group including copper, copper alloys, aluminum, aluminum alloys, iron-nickel alloys, and Kovar™

.

10. The method of claim 9 wherein the first material includes a plated layer of a metal selected from a group including tin, silver, nickel, palladium, and gold.

11. The method of claim 7 wherein the package of the fourth material includes a polymeric compound such as an epoxy-based molding compound.

12. The method of claim 7 wherein the second material is selected from a group including metal nanoparticles, metal-coated polymeric nanoparticles, metal-coated ceramic nanoparticles, and metal-coated plastic nanoparticles.

13. The method of claim 7 wherein the third material is selected from a group including metal oxides nanoparticles, polymeric compound nanoparticles, nitrogen compound nanoparticles, and electrically conducting nanoparticles coated with polymerics, oxides, and carbon compounds.

14. The method of claim 7 further including, before the process of encapsulating, the process of assembling a semiconductor circuit chip on the substrate so that the chip will be positioned inside the package after the process of encapsulating.