Scale measuring device, method for generating position information, and device with multi-axis stage
First Claim
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1. A scale device, comprising:
- A scale main body that comprises at least one incremental track;
two or more incremental signal detection heads that detect incremental signals from the incremental track; and
an operation processing unit that generates, using operating detection outputs by each of the two or more incremental signal detection heads;
relative positional information in an X axis direction of a measuring axis, andmovement amount information in a direction of an X axis and a Z axis that includes a distance between the scale and the two or more incremental signal detection heads.
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Abstract
A scale device includes a scale main body having at least two incremental tracks, at least two or more incremental signal detection heads for detecting incremental signals from the incremental tracks, and an operation processing unit that generates, based upon detection outputs by the two or more incremental signal detection heads, relative positional information in a measuring direction of a measuring axis and parallel movement amount information in a direction orthogonal to the measuring direction.
12 Citations
26 Claims
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1. A scale device, comprising:
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A scale main body that comprises at least one incremental track; two or more incremental signal detection heads that detect incremental signals from the incremental track; and an operation processing unit that generates, using operating detection outputs by each of the two or more incremental signal detection heads; relative positional information in an X axis direction of a measuring axis, and movement amount information in a direction of an X axis and a Z axis that includes a distance between the scale and the two or more incremental signal detection heads. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A multiaxial stage device comprising:
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a scale main body that comprises an absolute track with an absolute pattern and incremental tracks formed by incremental signal patterns placed on both sides of the absolute track to be inclined by 45 degrees in reversed directions relative to a measuring direction, which is placed on each axis; and an operation processing unit which based upon a detection output by an absolute pattern detection head for detecting the absolute pattern from the absolute track of the scale main body of each of the axes, generates absolute positional information, and by detecting incremental signals by at least three incremental signal detection heads from the incremental tracks, by at least three incremental signal detection heads located on the two incremental tracks formed with the absolute track being sandwiched therebetween, generates relative positional information in a measuring direction on a measuring axis and movement amount information in two axial directions of the measurement direction of the measurement axis and the direction that is orthogonal to the measurement direction of the measurement axis, or movement amount information in three axial directions of the measuring direction of the measuring axis and the directions that are mutually orthogonal to the measuring direction of the measuring axis, so that positional information is obtained, with the positional data obtained from the scale main bodies of the respective axes being mutually supplemented, wherein the movement amount information in a direction of an X axis and a Z axis are generated by the operation processing unit using an operating detection output of one of the at least three incremental signal detection heads, and wherein the movement amount information includes a distance between the scale and the two or more incremental signal detection heads. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21)
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22. A scale device, comprising:
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a scale that comprises at least one incremental track on which an incremental pattern is recorded; two or more incremental signal detection heads that detect the incremental pattern; an operation processing unit that generates, using operating detection outputs by each of the two or more incremental signal detection heads; relative positional information in an X axis direction of a measuring axis, and movement amount information in a direction of an X axis and a Z axis that includes a distance between the scale and the two or more incremental signal detection heads; and a first correction table on which a relationship between the strength of the incremental signals detected by the two or more incremental signal detection heads and a distance between the scale and the two or more incremental signal detection heads has been preliminarily recorded. - View Dependent Claims (23, 24, 25)
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26. A scale device, comprising:
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a scale that comprises at least one incremental track on which an incremental pattern is recorded; two or more incremental signal detection heads that detect the incremental pattern; and
operation means for;finding a relationship between the strength of the incremental signal detected by the two or more incremental signal detection heads and a distance between the scale and the two or more incremental signal detection heads, and generating, using operating detection outputs by each of the two or more incremental signal detection heads; relative positional information in an X axis direction of a measuring axis, and movement amount information in a direction of an X axis and a Z axis that includes a distance between the scale and the two or more incremental signal detection heads.
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Specification