Systems and methods for X-ray diffraction

• US 9,976,971 B2
• Filed: 03/05/2015
• Issued: 05/22/2018
• Est. Priority Date: 03/06/2014
• Status: Active Grant

• Current Assignee: Rtx Corporation
• Original Assignee: United Technologies Corporation (Raytheon Technologies Corporation d/b/a RTX)
• Inventors: Cernatescu, Iuliana, Furrer, David U.
• Primary Examiner(s): Ho, Allen C.
• Application Number:
  US14/639,460
• Publication Number:
  US 20150253262A1
• Time in Patent Office: 1,174 Days
• Field of Search: 378 9, 378 44- 50, 378 71, 378 73, 378 79, 378 81, 378 92, 378 989, 378 9811, 378114-118, 378121, 378124, 378143, 378144
• CPC Class Codes: G01N 23/20 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
• CPC Class Codes: G01N 23/20008 Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor monochromators for X- rays using crystals G21K1/06
• CPC Class Codes: G01N 23/20025 Sample holders or supports therefor
• CPC Class Codes: G01N 23/207 Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
• CPC Class Codes: H01J 2235/081 Target material
• CPC Class Codes: H01J 2235/086 Target geometry
• CPC Class Codes: H01J 35/02 Details
• CPC Class Codes: H01J 35/025 X-ray tubes with structurally associated circuit elements
• CPC Class Codes: H01J 35/10 Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
• CPC Class Codes: H01J 35/101 Arrangements for rotating anodes, e.g. supporting means, means for greasing, means for sealing the axle or means for shielding or protecting the driving
• CPC Class Codes: H01J 35/112 Non-rotating anodes H01J35/12 takes precedence
• CPC Class Codes: H01J 35/16 Vessels; Containers; Shields associated therewith
• CPC Class Codes: H01J 35/24 Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
• CPC Class Codes: H01J 35/26 by rotation of the anode or anticathode

Abstract

An x-ray diffraction system includes an x-ray source having a first interchangeable x-ray generating component, a second interchangeable x-ray generating component, an actuator and a controller operatively connected to the actuator. The first and second interchangeable x-ray generating components are interchangeable with one another. The actuator is operatively connected to the first and second interchangeable x-ray generating components. A method for non-destructive x-ray diffraction includes emitting a first x-ray beam from an x-ray source with a first interchangeable x-ray generating component based on a first desired depth to measure a crystallographic signature of a sample at the first desired depth, interchanging the first interchangeable x-ray generating component with a second interchangeable x-ray generating component to form a modified x-ray source, and emitting a second x-ray beam from the modified x-ray source based on a second desired depth, to non-destructively measure a crystallographic signature of the sample at the second desired depth.

Claims

1. An x-ray diffraction system comprising:

an x-ray source including a first interchangeable x-ray generating component;

a second interchangeable x-ray generating component configured to be interchanged with the first interchangeable x-ray generating component;

an actuator operatively connected to both the first interchangeable x-ray generating component and the second interchangeable x-ray generating component for mechanically interchanging the first interchangeable x-ray generating component with the second interchangeable x-ray generating component; and

a controller operatively connected to the actuator,

wherein the first interchangeable x-ray generating component comprises a first interchangeable x-ray tube and the second interchangeable x-ray generating component comprises a second interchangeable x-ray tube.

2. An x-ray diffraction system as recited in claim 1, wherein the first interchangeable x-ray tube is configured to emit a respective first x-ray beam at a first energy and a first wavelength and wherein the second interchangeable x-ray tube is configured to emit a respective second x-ray beam at a second energy and a second wavelength, wherein at least one of the first energy and the first wavelength is different from at least one of the second energy and the second wavelength.

3. An x-ray diffraction system as recited in claim 1, wherein the first interchangeable x-ray tube includes a first interchangeable x-ray target and the second interchangeable x-ray tube includes a second interchangeable x-ray target, wherein the first interchangeable x-ray target of the first interchangeable x-ray tube is different from the second interchangeable x-ray target of the second interchangeable x-ray tube.

4. An x-ray diffraction system as recited in claim 3, wherein at least one of the first interchangeable x-ray target of the first interchangeable x-ray tube and the second interchangeable x-ray target of the second interchangeable x-ray tube includes a material selected from the group consisting of copper, silver, chromium, vanadium, manganese, cobalt, molybdenum, and titanium.

5. A method for non-destructive x-ray diffraction, comprising:

emitting a first x-ray beam from an x-ray source with a first interchangeable x-ray generating component based on a first desired measurement depth, wherein the first x-ray beam has first energy and a first wavelength, wherein the first x-ray beam is emitted in response to a first focused stream of electrons directed at the first interchangeable x-ray generating component and wherein the first x-ray beam is not parallel to the first focused stream of electrons, wherein the first x-ray beam is not a transmitted x-ray beam;

measuring a crystallographic signature of a sample at the first desired measurement depth;

interchanging the first interchangeable x-ray generating component with a second interchangeable x-ray generating component to form a modified x-ray source;

emitting a second x-ray beam from the modified x-ray source based on a second desired measurement depth, wherein the second desired measurement depth is different from the first desired measurement depth, wherein the second x-ray beam has second energy and a second wavelength, wherein the second x-ray beam is emitted in response to a second focused stream of electrons directed at the second interchangeable x-ray generating component and wherein the second x-ray beam is not parallel to the second focused stream of electrons, wherein the second x-ray beam is not a transmitted x-ray beam; and

measuring a crystallographic signature of the sample at the second desired measurement depth.

6. A method as recited in claim 5, wherein the step of interchanging the first interchangeable x-ray generating component with a second interchangeable x-ray generating component includes interchanging a first interchangeable x-ray target with a second interchangeable x-ray target.

7. A method as recited in claim 5, wherein at least one of the first energy and the first wavelength is different from at least one of the second energy and the second wavelength.

8. A method as recited in claim 5, further comprising adjusting an alignment of the sample relative to at least one of the x-ray source and the modified x-ray source to adjust an angle of incidence between at least one of the first x-ray beam, the second x-ray beam, and the sample.

9. A method as recited in claim 5, further comprising adjusting an alignment of a multi-axis sample stage relative to at least one of the x-ray source and the modified x-ray source based on a desired crystallographic measurement depth in the sample.

10. A method for non-destructive x-ray diffraction, comprising:

emitting a first x-ray beam from an x-ray source with a first interchangeable x-ray generating component based on a first desired measurement depth;

measuring a crystallographic signature of a sample at the first desired measurement depth;

interchanging the first interchangeable x-ray generating component with a second interchangeable x-ray generating component to form a modified x-ray source;

emitting a second x-ray beam from the modified x-ray source based on a second desired measurement depth, wherein the second desired measurement depth is different from the first desired measurement depth; and

measuring a crystallographic signature of the sample at the second desired measurement depth,

wherein the step of interchanging the first interchangeable x-ray generating component with a second interchangeable x-ray generating component includes interchanging a first interchangeable x-ray tube with a second interchangeable x-ray tube.

11. A tangible, non-transitory, computer-readable media having software encoded thereon, the software, when executed by a processor, operable to:

receive a first desired crystallographic measurement depth of a sample;

select a first interchangeable x-ray target and at least one of an incident beam collimating optic and a diffracted beam collimating optic based on the first desired crystallographic measurement depth for use in non-destructive x-ray crystallography, wherein the first interchangeable x-ray target is configured to emit a first x-ray beam at a first energy and a first wave length towards the sample, wherein the first x-ray beam is emitted in response to a first focused stream of electrons directed at the first interchangeable x-ray generating component and wherein the first x-ray beam is not parallel to the first focused stream of electrons, wherein the first x-ray beam is not a transmitted x-ray beam;

execute a command to cause an actuator to mechanically alter the current interchangeable x-ray target and at least one of the incident beam collimating optic and the diffracted beam collimating optic to match the selected first interchangeable x-ray target and at least one of the incident beam collimating optic and the diffracted beam collimating optic for non-destructive below surface measurements of the sample;

receive a second desired crystallographic measurement depth of the sample;

select a second interchangeable x-ray target and at least one of the incident beam collimating optic and the diffracted beam collimating optic based on the second desired crystallographic measurement depth for use in non-destructive x-ray crystallography, wherein the second interchangeable x-ray target is configured to emit a second x-ray beam at a second energy and a second wave length towards the sample, wherein the second x-ray beam is emitted in response to a second focused stream of electrons directed at the second interchangeable x-ray generating component and wherein the second x-ray beam is not parallel to the second focused stream of electrons, wherein the second x-ray beam is not a transmitted x-ray beam; and

execute a command to cause an actuator to mechanically alter the current interchangeable x-ray target and at least one of the incident beam collimating optic and the diffracted beam collimating optic to match the selected second interchangeable x-ray target and at least one of the incident beam collimating optic and the diffracted beam collimating optic for non-destructive below surface measurements of the sample.