Method of fabricating cylindrical polymer mask
First Claim
1. A method of making a rotatable mask, the method comprising:
- a) depositing a first polymer precursor liquid on a first surface of a first master mask, wherein the first surface of the first master mask includes a pattern;
b) curing the first polymer precursor liquid to create a first cured polymer, wherein the first cured polymer and the first master mask together form a laminate;
c) configuring a first end of the laminate to have a strip of the first cured polymer missing and a second end of the laminate to have a strip of the first master mask missing;
d) rolling the laminate inside of a first casting component;
e) depositing a second polymer precursor liquid in a gap of the rolled laminate that corresponds to the strip of the first cured polymer;
f) curing the second polymer precursor liquid to form a second cured polymer, whereby the first cured polymer and the second cured polymer together form a compliant layer for the rotatable mask, whereby the outer surface of the compliant layer includes a pattern that corresponds to the pattern of the first master mask.
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Accused Products
Abstract
A cylindrical mask may be fabricated using a hollow casting cylinder and a mask cylinder. The casting cylinder has an inner diameter that is larger than the outer diameter of the mask cylinder. The casting and mask cylinders are coaxially assembled and a liquid polymer inserted in a space surrounding the mask cylinder between the inner surface of the casting cylinder and the outer surface of the mask cylinder. After curing the liquid polymer, the casting cylinder is removed. A surface of the cured polymer can be patterned. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
53 Citations
12 Claims
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1. A method of making a rotatable mask, the method comprising:
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a) depositing a first polymer precursor liquid on a first surface of a first master mask, wherein the first surface of the first master mask includes a pattern; b) curing the first polymer precursor liquid to create a first cured polymer, wherein the first cured polymer and the first master mask together form a laminate; c) configuring a first end of the laminate to have a strip of the first cured polymer missing and a second end of the laminate to have a strip of the first master mask missing; d) rolling the laminate inside of a first casting component; e) depositing a second polymer precursor liquid in a gap of the rolled laminate that corresponds to the strip of the first cured polymer; f) curing the second polymer precursor liquid to form a second cured polymer, whereby the first cured polymer and the second cured polymer together form a compliant layer for the rotatable mask, whereby the outer surface of the compliant layer includes a pattern that corresponds to the pattern of the first master mask. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification