Lighting apparatus, exposure apparatus and maicrodevice manufacturing method

Lighting apparatus, exposure apparatus and maicrodevice manufacturing method

  • CN 100,452,295 C
  • Filed: 09/21/2005
  • Issued: 01/14/2009
  • Est. Priority Date: 09/22/2004
  • Status: Active Grant
First Claim
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1. lighting device is with the emitted illumination light of the light source plane of illumination that throws light on, and it is characterized in that possessing:

  • The reflective compound eye optical system is disposed between this light source and plane of illumination, and by being constituted in order to the beam wave surface of light source is cut apart the superimposed a plurality of partial reflection type optical systems on plane of illumination in back;

    AndReflection optical system is disposed between this light source and reflective compound eye optical system, in order to this illumination light is guided toward this reflective compound eye optical system;

    This reflection optical system, reflecting surface at least a portion of this reflection optical system is made of diffusingsurface.

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