Method for controlling preventive maintenance cycles of semiconductor fabricating equipments arranged in controlling system

Method for controlling preventive maintenance cycles of semiconductor fabricating equipments arranged in controlling system

  • CN 100,476,749 C
  • Filed: 06/12/1998
  • Issued: 04/08/2009
  • Est. Priority Date: 01/14/1998
  • Status: Active Grant
First Claim
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1. one kind is used for control setting in the method in the preventive maintenance cycle of the semiconductor manufacturing facility of control system, and this method comprises the steps:

  • From corresponding semiconductor manufacturing facility, receive operational parameter data;

    Retrieval PM cycle specification table;

    Determine whether described operational parameter data value is above specification data value given in described PM cycle specification table;

    If determining the described operational parameter data value of certain semiconductor manufacturing facility in the described semiconductor manufacturing facility is not the above value of described specification data corresponding to described certain semiconductor manufacturing facility, just change the key value of the variable ID of described certain semiconductor manufacturing facility;

    AndThe described variable ID of the key value by will having described change is added on the predetermined device control message and the device control message that will have a described variable ID of the key value that is loaded with described change downloads in described certain semiconductor manufacturing facility, changes the running status of described certain semiconductor manufacturing facility whereby.

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