Pressure sensor with top side reference cavity

Pressure sensor with top side reference cavity

  • CN 101,052,864 A
  • Filed: 10/18/2005
  • Published: 10/10/2007
  • Est. Priority Date: 10/18/2004
  • Status: Active Application
First Claim
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1. The right that exclusively enjoys in the embodiment of the invention is needed as follows:

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